11/14/2012	9:43:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	9:43:18 AM	Recipe started at 9:43 AM
11/14/2012	9:43:18 AM	Helium valve closed
11/14/2012	9:43:18 AM	H2 valve closed
11/14/2012	9:43:18 AM	BCl3 valve closed
11/14/2012	9:43:18 AM	PH3 valve closed
11/14/2012	9:43:18 AM	SiCl4 pre valve closed
11/14/2012	9:43:18 AM	SiCl4 post valve closed
11/14/2012	9:43:18 AM	Main Vac valve closed
11/14/2012	9:43:18 AM	Bypass valve closed
11/14/2012	9:43:18 AM	Bubbler valve closed
11/14/2012	9:43:18 AM	Helium MFC set to  0.000000
11/14/2012	9:43:18 AM	H2 MFC set to  0.000000
11/14/2012	9:43:18 AM	BCl3 MFC set to  0.000000
11/14/2012	9:43:18 AM	PH3 MFC set to  0.000000
11/14/2012	9:43:18 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:43:18 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:43:18 AM	Tube furnace set to 0
11/14/2012	9:43:21 AM	H2 valve closed
11/14/2012	9:43:21 AM	BCl3 valve closed
11/14/2012	9:43:21 AM	PH3 valve closed
11/14/2012	9:43:21 AM	SiCl4 pre valve closed
11/14/2012	9:43:21 AM	SiCl4 post valve closed
11/14/2012	9:43:21 AM	Main Vac valve closed
11/14/2012	9:43:21 AM	Bypass valve closed
11/14/2012	9:43:21 AM	Bubbler valve closed
11/14/2012	9:43:21 AM	Helium valve opened
11/14/2012	9:43:21 AM	Helium MFC set to  500.000000
11/14/2012	9:43:21 AM	H2 MFC set to  0.000000
11/14/2012	9:43:21 AM	BCl3 MFC set to  0.000000
11/14/2012	9:43:21 AM	PH3 MFC set to  0.000000
11/14/2012	9:43:21 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:43:21 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:43:22 AM	Tube furnace set to 0
11/14/2012	9:44:35 AM	Helium valve closed
11/14/2012	9:44:35 AM	H2 valve closed
11/14/2012	9:44:35 AM	BCl3 valve closed
11/14/2012	9:44:35 AM	PH3 valve closed
11/14/2012	9:44:35 AM	SiCl4 pre valve closed
11/14/2012	9:44:35 AM	SiCl4 post valve closed
11/14/2012	9:44:35 AM	Main Vac valve closed
11/14/2012	9:44:35 AM	Bypass valve closed
11/14/2012	9:44:35 AM	Bubbler valve closed
11/14/2012	9:44:35 AM	Helium MFC set to  0.000000
11/14/2012	9:44:35 AM	H2 MFC set to  0.000000
11/14/2012	9:44:35 AM	BCl3 MFC set to  0.000000
11/14/2012	9:44:35 AM	PH3 MFC set to  0.000000
11/14/2012	9:44:35 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:44:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:44:35 AM	Tube furnace set to 0
11/14/2012	9:44:36 AM	Run finished at 9:44 AM
11/14/2012	9:44:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	9:47:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	9:47:18 AM	Recipe started at 9:47 AM
11/14/2012	9:47:18 AM	Helium valve closed
11/14/2012	9:47:18 AM	H2 valve closed
11/14/2012	9:47:18 AM	BCl3 valve closed
11/14/2012	9:47:18 AM	PH3 valve closed
11/14/2012	9:47:18 AM	SiCl4 pre valve closed
11/14/2012	9:47:18 AM	SiCl4 post valve closed
11/14/2012	9:47:18 AM	Main Vac valve closed
11/14/2012	9:47:18 AM	Bubbler valve closed
11/14/2012	9:47:18 AM	Bypass valve opened
11/14/2012	9:47:18 AM	Helium MFC set to  0.000000
11/14/2012	9:47:18 AM	H2 MFC set to  0.000000
11/14/2012	9:47:18 AM	BCl3 MFC set to  0.000000
11/14/2012	9:47:18 AM	PH3 MFC set to  0.000000
11/14/2012	9:47:18 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:47:18 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:47:18 AM	Tube furnace set to 0
11/14/2012	9:48:27 AM	Helium valve closed
11/14/2012	9:48:27 AM	H2 valve closed
11/14/2012	9:48:27 AM	BCl3 valve closed
11/14/2012	9:48:27 AM	PH3 valve closed
11/14/2012	9:48:27 AM	SiCl4 pre valve closed
11/14/2012	9:48:27 AM	SiCl4 post valve closed
11/14/2012	9:48:27 AM	Main Vac valve closed
11/14/2012	9:48:27 AM	Bubbler valve closed
11/14/2012	9:48:27 AM	Bypass valve opened
11/14/2012	9:48:27 AM	Helium MFC set to  0.000000
11/14/2012	9:48:27 AM	H2 MFC set to  0.000000
11/14/2012	9:48:27 AM	BCl3 MFC set to  0.000000
11/14/2012	9:48:27 AM	PH3 MFC set to  0.000000
11/14/2012	9:48:27 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:48:27 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:48:28 AM	Tube furnace set to 0
11/14/2012	9:49:27 AM	Helium valve closed
11/14/2012	9:49:27 AM	H2 valve closed
11/14/2012	9:49:27 AM	BCl3 valve closed
11/14/2012	9:49:27 AM	PH3 valve closed
11/14/2012	9:49:27 AM	SiCl4 pre valve closed
11/14/2012	9:49:27 AM	SiCl4 post valve closed
11/14/2012	9:49:27 AM	Bypass valve closed
11/14/2012	9:49:27 AM	Bubbler valve closed
11/14/2012	9:49:27 AM	Main Vac valve opened
11/14/2012	9:49:27 AM	Helium MFC set to  0.000000
11/14/2012	9:49:27 AM	H2 MFC set to  0.000000
11/14/2012	9:49:27 AM	BCl3 MFC set to  0.000000
11/14/2012	9:49:27 AM	PH3 MFC set to  0.000000
11/14/2012	9:49:27 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:49:27 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:49:28 AM	Tube furnace set to 0
11/14/2012	9:49:29 AM	Run finished at 9:49 AM
11/14/2012	9:49:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	9:50:20 AM	Tube furnace set to 20
11/14/2012	9:50:23 AM	Tube furnace set to 200
11/14/2012	9:54:07 AM	Recipe started at 9:53 AM
11/14/2012	9:54:07 AM	Helium valve closed
11/14/2012	9:54:07 AM	H2 valve closed
11/14/2012	9:54:07 AM	BCl3 valve closed
11/14/2012	9:54:07 AM	PH3 valve closed
11/14/2012	9:54:07 AM	SiCl4 pre valve closed
11/14/2012	9:54:07 AM	SiCl4 post valve closed
11/14/2012	9:54:07 AM	Bypass valve closed
11/14/2012	9:54:07 AM	Bubbler valve closed
11/14/2012	9:54:07 AM	Main Vac valve opened
11/14/2012	9:54:07 AM	Helium MFC set to  0.000000
11/14/2012	9:54:07 AM	H2 MFC set to  0.000000
11/14/2012	9:54:07 AM	BCl3 MFC set to  0.000000
11/14/2012	9:54:07 AM	PH3 MFC set to  0.000000
11/14/2012	9:54:07 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:54:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:54:07 AM	Tube furnace set to 0
11/14/2012	9:54:37 AM	H2 valve closed
11/14/2012	9:54:37 AM	BCl3 valve closed
11/14/2012	9:54:37 AM	PH3 valve closed
11/14/2012	9:54:37 AM	SiCl4 pre valve closed
11/14/2012	9:54:37 AM	SiCl4 post valve closed
11/14/2012	9:54:37 AM	Bypass valve closed
11/14/2012	9:54:37 AM	Bubbler valve closed
11/14/2012	9:54:37 AM	Helium valve opened
11/14/2012	9:54:37 AM	Main Vac valve opened
11/14/2012	9:54:37 AM	Helium MFC set to  20.000000
11/14/2012	9:54:37 AM	H2 MFC set to  0.000000
11/14/2012	9:54:37 AM	BCl3 MFC set to  0.000000
11/14/2012	9:54:37 AM	PH3 MFC set to  0.000000
11/14/2012	9:54:37 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:54:37 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:54:37 AM	Tube furnace set to 0
11/14/2012	9:55:07 AM	Helium valve closed
11/14/2012	9:55:07 AM	H2 valve closed
11/14/2012	9:55:07 AM	BCl3 valve closed
11/14/2012	9:55:07 AM	PH3 valve closed
11/14/2012	9:55:07 AM	SiCl4 pre valve closed
11/14/2012	9:55:07 AM	SiCl4 post valve closed
11/14/2012	9:55:07 AM	Bypass valve closed
11/14/2012	9:55:07 AM	Bubbler valve closed
11/14/2012	9:55:07 AM	Main Vac valve opened
11/14/2012	9:55:07 AM	Helium MFC set to  0.000000
11/14/2012	9:55:07 AM	H2 MFC set to  0.000000
11/14/2012	9:55:07 AM	BCl3 MFC set to  0.000000
11/14/2012	9:55:07 AM	PH3 MFC set to  0.000000
11/14/2012	9:55:07 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:55:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:55:08 AM	Tube furnace set to 0
11/14/2012	9:55:38 AM	H2 valve closed
11/14/2012	9:55:38 AM	BCl3 valve closed
11/14/2012	9:55:38 AM	PH3 valve closed
11/14/2012	9:55:38 AM	SiCl4 pre valve closed
11/14/2012	9:55:38 AM	SiCl4 post valve closed
11/14/2012	9:55:38 AM	Bypass valve closed
11/14/2012	9:55:38 AM	Bubbler valve closed
11/14/2012	9:55:38 AM	Helium valve opened
11/14/2012	9:55:38 AM	Main Vac valve opened
11/14/2012	9:55:38 AM	Helium MFC set to  20.000000
11/14/2012	9:55:38 AM	H2 MFC set to  0.000000
11/14/2012	9:55:38 AM	BCl3 MFC set to  0.000000
11/14/2012	9:55:38 AM	PH3 MFC set to  0.000000
11/14/2012	9:55:38 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:55:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:55:38 AM	Tube furnace set to 0
11/14/2012	9:56:08 AM	Helium valve closed
11/14/2012	9:56:08 AM	H2 valve closed
11/14/2012	9:56:08 AM	BCl3 valve closed
11/14/2012	9:56:08 AM	PH3 valve closed
11/14/2012	9:56:08 AM	SiCl4 pre valve closed
11/14/2012	9:56:08 AM	SiCl4 post valve closed
11/14/2012	9:56:08 AM	Bypass valve closed
11/14/2012	9:56:08 AM	Bubbler valve closed
11/14/2012	9:56:08 AM	Main Vac valve opened
11/14/2012	9:56:08 AM	Helium MFC set to  0.000000
11/14/2012	9:56:08 AM	H2 MFC set to  0.000000
11/14/2012	9:56:08 AM	BCl3 MFC set to  0.000000
11/14/2012	9:56:08 AM	PH3 MFC set to  0.000000
11/14/2012	9:56:08 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:56:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:56:08 AM	Tube furnace set to 0
11/14/2012	9:56:38 AM	H2 valve closed
11/14/2012	9:56:38 AM	BCl3 valve closed
11/14/2012	9:56:38 AM	PH3 valve closed
11/14/2012	9:56:38 AM	SiCl4 pre valve closed
11/14/2012	9:56:38 AM	SiCl4 post valve closed
11/14/2012	9:56:38 AM	Bypass valve closed
11/14/2012	9:56:38 AM	Bubbler valve closed
11/14/2012	9:56:38 AM	Helium valve opened
11/14/2012	9:56:38 AM	Main Vac valve opened
11/14/2012	9:56:38 AM	Helium MFC set to  20.000000
11/14/2012	9:56:38 AM	H2 MFC set to  0.000000
11/14/2012	9:56:38 AM	BCl3 MFC set to  0.000000
11/14/2012	9:56:38 AM	PH3 MFC set to  0.000000
11/14/2012	9:56:38 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:56:38 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:56:38 AM	Tube furnace set to 0
11/14/2012	9:57:08 AM	Helium valve closed
11/14/2012	9:57:08 AM	H2 valve closed
11/14/2012	9:57:08 AM	BCl3 valve closed
11/14/2012	9:57:08 AM	PH3 valve closed
11/14/2012	9:57:08 AM	SiCl4 pre valve closed
11/14/2012	9:57:08 AM	SiCl4 post valve closed
11/14/2012	9:57:08 AM	Bypass valve closed
11/14/2012	9:57:08 AM	Bubbler valve closed
11/14/2012	9:57:08 AM	Main Vac valve opened
11/14/2012	9:57:08 AM	Helium MFC set to  0.000000
11/14/2012	9:57:08 AM	H2 MFC set to  0.000000
11/14/2012	9:57:08 AM	BCl3 MFC set to  0.000000
11/14/2012	9:57:08 AM	PH3 MFC set to  0.000000
11/14/2012	9:57:08 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:57:08 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:57:09 AM	Tube furnace set to 0
11/14/2012	9:57:39 AM	H2 valve closed
11/14/2012	9:57:39 AM	BCl3 valve closed
11/14/2012	9:57:39 AM	PH3 valve closed
11/14/2012	9:57:39 AM	SiCl4 pre valve closed
11/14/2012	9:57:39 AM	SiCl4 post valve closed
11/14/2012	9:57:39 AM	Bypass valve closed
11/14/2012	9:57:39 AM	Bubbler valve closed
11/14/2012	9:57:39 AM	Helium valve opened
11/14/2012	9:57:39 AM	Main Vac valve opened
11/14/2012	9:57:39 AM	Helium MFC set to  20.000000
11/14/2012	9:57:39 AM	H2 MFC set to  0.000000
11/14/2012	9:57:39 AM	BCl3 MFC set to  0.000000
11/14/2012	9:57:39 AM	PH3 MFC set to  0.000000
11/14/2012	9:57:39 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:57:39 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:57:39 AM	Tube furnace set to 0
11/14/2012	9:58:09 AM	Helium valve closed
11/14/2012	9:58:09 AM	H2 valve closed
11/14/2012	9:58:09 AM	BCl3 valve closed
11/14/2012	9:58:09 AM	PH3 valve closed
11/14/2012	9:58:09 AM	SiCl4 pre valve closed
11/14/2012	9:58:09 AM	SiCl4 post valve closed
11/14/2012	9:58:09 AM	Bypass valve closed
11/14/2012	9:58:09 AM	Bubbler valve closed
11/14/2012	9:58:09 AM	Main Vac valve opened
11/14/2012	9:58:09 AM	Helium MFC set to  0.000000
11/14/2012	9:58:09 AM	H2 MFC set to  0.000000
11/14/2012	9:58:09 AM	BCl3 MFC set to  0.000000
11/14/2012	9:58:09 AM	PH3 MFC set to  0.000000
11/14/2012	9:58:09 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:58:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:58:09 AM	Tube furnace set to 0
11/14/2012	9:58:39 AM	H2 valve closed
11/14/2012	9:58:39 AM	BCl3 valve closed
11/14/2012	9:58:39 AM	PH3 valve closed
11/14/2012	9:58:39 AM	SiCl4 pre valve closed
11/14/2012	9:58:39 AM	SiCl4 post valve closed
11/14/2012	9:58:39 AM	Bypass valve closed
11/14/2012	9:58:39 AM	Bubbler valve closed
11/14/2012	9:58:39 AM	Helium valve opened
11/14/2012	9:58:39 AM	Main Vac valve opened
11/14/2012	9:58:39 AM	Helium MFC set to  20.000000
11/14/2012	9:58:39 AM	H2 MFC set to  0.000000
11/14/2012	9:58:39 AM	BCl3 MFC set to  0.000000
11/14/2012	9:58:39 AM	PH3 MFC set to  0.000000
11/14/2012	9:58:39 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:58:39 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:58:39 AM	Tube furnace set to 0
11/14/2012	9:59:09 AM	Helium valve closed
11/14/2012	9:59:09 AM	H2 valve closed
11/14/2012	9:59:09 AM	BCl3 valve closed
11/14/2012	9:59:09 AM	PH3 valve closed
11/14/2012	9:59:09 AM	SiCl4 pre valve closed
11/14/2012	9:59:09 AM	SiCl4 post valve closed
11/14/2012	9:59:09 AM	Bypass valve closed
11/14/2012	9:59:09 AM	Bubbler valve closed
11/14/2012	9:59:09 AM	Main Vac valve opened
11/14/2012	9:59:09 AM	Helium MFC set to  0.000000
11/14/2012	9:59:09 AM	H2 MFC set to  0.000000
11/14/2012	9:59:09 AM	BCl3 MFC set to  0.000000
11/14/2012	9:59:09 AM	PH3 MFC set to  0.000000
11/14/2012	9:59:09 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:59:09 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:59:10 AM	Tube furnace set to 0
11/14/2012	9:59:40 AM	H2 valve closed
11/14/2012	9:59:40 AM	BCl3 valve closed
11/14/2012	9:59:40 AM	PH3 valve closed
11/14/2012	9:59:40 AM	SiCl4 pre valve closed
11/14/2012	9:59:40 AM	SiCl4 post valve closed
11/14/2012	9:59:40 AM	Bypass valve closed
11/14/2012	9:59:40 AM	Bubbler valve closed
11/14/2012	9:59:40 AM	Helium valve opened
11/14/2012	9:59:40 AM	Main Vac valve opened
11/14/2012	9:59:40 AM	Helium MFC set to  20.000000
11/14/2012	9:59:40 AM	H2 MFC set to  0.000000
11/14/2012	9:59:40 AM	BCl3 MFC set to  0.000000
11/14/2012	9:59:40 AM	PH3 MFC set to  0.000000
11/14/2012	9:59:40 AM	SiCl4 MFC set to  0.000000
11/14/2012	9:59:40 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	9:59:40 AM	Tube furnace set to 0
11/14/2012	10:00:10 AM	Helium valve closed
11/14/2012	10:00:10 AM	H2 valve closed
11/14/2012	10:00:10 AM	BCl3 valve closed
11/14/2012	10:00:10 AM	PH3 valve closed
11/14/2012	10:00:10 AM	SiCl4 pre valve closed
11/14/2012	10:00:10 AM	SiCl4 post valve closed
11/14/2012	10:00:10 AM	Bypass valve closed
11/14/2012	10:00:10 AM	Bubbler valve closed
11/14/2012	10:00:10 AM	Main Vac valve opened
11/14/2012	10:00:10 AM	Helium MFC set to  0.000000
11/14/2012	10:00:10 AM	H2 MFC set to  0.000000
11/14/2012	10:00:10 AM	BCl3 MFC set to  0.000000
11/14/2012	10:00:10 AM	PH3 MFC set to  0.000000
11/14/2012	10:00:10 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:00:10 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:00:10 AM	Tube furnace set to 0
11/14/2012	10:00:40 AM	H2 valve closed
11/14/2012	10:00:40 AM	BCl3 valve closed
11/14/2012	10:00:40 AM	PH3 valve closed
11/14/2012	10:00:40 AM	SiCl4 pre valve closed
11/14/2012	10:00:40 AM	SiCl4 post valve closed
11/14/2012	10:00:40 AM	Bypass valve closed
11/14/2012	10:00:40 AM	Bubbler valve closed
11/14/2012	10:00:40 AM	Helium valve opened
11/14/2012	10:00:40 AM	Main Vac valve opened
11/14/2012	10:00:40 AM	Helium MFC set to  20.000000
11/14/2012	10:00:40 AM	H2 MFC set to  0.000000
11/14/2012	10:00:40 AM	BCl3 MFC set to  0.000000
11/14/2012	10:00:40 AM	PH3 MFC set to  0.000000
11/14/2012	10:00:40 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:00:40 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:00:40 AM	Tube furnace set to 0
11/14/2012	10:01:10 AM	Helium valve closed
11/14/2012	10:01:10 AM	H2 valve closed
11/14/2012	10:01:10 AM	BCl3 valve closed
11/14/2012	10:01:10 AM	PH3 valve closed
11/14/2012	10:01:10 AM	SiCl4 pre valve closed
11/14/2012	10:01:10 AM	SiCl4 post valve closed
11/14/2012	10:01:10 AM	Bypass valve closed
11/14/2012	10:01:10 AM	Bubbler valve closed
11/14/2012	10:01:10 AM	Main Vac valve opened
11/14/2012	10:01:10 AM	Helium MFC set to  0.000000
11/14/2012	10:01:10 AM	H2 MFC set to  0.000000
11/14/2012	10:01:10 AM	BCl3 MFC set to  0.000000
11/14/2012	10:01:10 AM	PH3 MFC set to  0.000000
11/14/2012	10:01:10 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:01:10 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:01:11 AM	Tube furnace set to 0
11/14/2012	10:01:41 AM	H2 valve closed
11/14/2012	10:01:41 AM	BCl3 valve closed
11/14/2012	10:01:41 AM	PH3 valve closed
11/14/2012	10:01:41 AM	SiCl4 pre valve closed
11/14/2012	10:01:41 AM	SiCl4 post valve closed
11/14/2012	10:01:41 AM	Bypass valve closed
11/14/2012	10:01:41 AM	Bubbler valve closed
11/14/2012	10:01:41 AM	Helium valve opened
11/14/2012	10:01:41 AM	Main Vac valve opened
11/14/2012	10:01:41 AM	Helium MFC set to  20.000000
11/14/2012	10:01:41 AM	H2 MFC set to  0.000000
11/14/2012	10:01:41 AM	BCl3 MFC set to  0.000000
11/14/2012	10:01:41 AM	PH3 MFC set to  0.000000
11/14/2012	10:01:41 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:01:41 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:01:41 AM	Tube furnace set to 0
11/14/2012	10:02:11 AM	Helium valve closed
11/14/2012	10:02:11 AM	H2 valve closed
11/14/2012	10:02:11 AM	BCl3 valve closed
11/14/2012	10:02:11 AM	PH3 valve closed
11/14/2012	10:02:11 AM	SiCl4 pre valve closed
11/14/2012	10:02:11 AM	SiCl4 post valve closed
11/14/2012	10:02:11 AM	Bypass valve closed
11/14/2012	10:02:11 AM	Bubbler valve closed
11/14/2012	10:02:11 AM	Main Vac valve opened
11/14/2012	10:02:11 AM	Helium MFC set to  0.000000
11/14/2012	10:02:11 AM	H2 MFC set to  0.000000
11/14/2012	10:02:11 AM	BCl3 MFC set to  0.000000
11/14/2012	10:02:11 AM	PH3 MFC set to  0.000000
11/14/2012	10:02:11 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:02:11 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:02:11 AM	Tube furnace set to 0
11/14/2012	10:02:41 AM	H2 valve closed
11/14/2012	10:02:41 AM	BCl3 valve closed
11/14/2012	10:02:41 AM	PH3 valve closed
11/14/2012	10:02:41 AM	SiCl4 pre valve closed
11/14/2012	10:02:41 AM	SiCl4 post valve closed
11/14/2012	10:02:41 AM	Bypass valve closed
11/14/2012	10:02:41 AM	Bubbler valve closed
11/14/2012	10:02:41 AM	Helium valve opened
11/14/2012	10:02:41 AM	Main Vac valve opened
11/14/2012	10:02:41 AM	Helium MFC set to  20.000000
11/14/2012	10:02:41 AM	H2 MFC set to  0.000000
11/14/2012	10:02:41 AM	BCl3 MFC set to  0.000000
11/14/2012	10:02:41 AM	PH3 MFC set to  0.000000
11/14/2012	10:02:41 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:02:41 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:02:41 AM	Tube furnace set to 0
11/14/2012	10:03:11 AM	Helium valve closed
11/14/2012	10:03:11 AM	H2 valve closed
11/14/2012	10:03:11 AM	BCl3 valve closed
11/14/2012	10:03:11 AM	PH3 valve closed
11/14/2012	10:03:11 AM	SiCl4 pre valve closed
11/14/2012	10:03:11 AM	SiCl4 post valve closed
11/14/2012	10:03:11 AM	Bypass valve closed
11/14/2012	10:03:11 AM	Bubbler valve closed
11/14/2012	10:03:11 AM	Main Vac valve opened
11/14/2012	10:03:11 AM	Helium MFC set to  0.000000
11/14/2012	10:03:11 AM	H2 MFC set to  0.000000
11/14/2012	10:03:11 AM	BCl3 MFC set to  0.000000
11/14/2012	10:03:11 AM	PH3 MFC set to  0.000000
11/14/2012	10:03:11 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:03:11 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:03:12 AM	Tube furnace set to 200
11/14/2012	10:03:42 AM	H2 valve closed
11/14/2012	10:03:42 AM	BCl3 valve closed
11/14/2012	10:03:42 AM	PH3 valve closed
11/14/2012	10:03:42 AM	SiCl4 pre valve closed
11/14/2012	10:03:42 AM	SiCl4 post valve closed
11/14/2012	10:03:42 AM	Bypass valve closed
11/14/2012	10:03:42 AM	Bubbler valve closed
11/14/2012	10:03:42 AM	Helium valve opened
11/14/2012	10:03:42 AM	Main Vac valve opened
11/14/2012	10:03:42 AM	Helium MFC set to  20.000000
11/14/2012	10:03:42 AM	H2 MFC set to  0.000000
11/14/2012	10:03:42 AM	BCl3 MFC set to  0.000000
11/14/2012	10:03:42 AM	PH3 MFC set to  0.000000
11/14/2012	10:03:42 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:03:42 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:03:42 AM	Tube furnace set to 200
11/14/2012	10:04:12 AM	Helium valve closed
11/14/2012	10:04:12 AM	H2 valve closed
11/14/2012	10:04:12 AM	BCl3 valve closed
11/14/2012	10:04:12 AM	PH3 valve closed
11/14/2012	10:04:12 AM	SiCl4 pre valve closed
11/14/2012	10:04:12 AM	SiCl4 post valve closed
11/14/2012	10:04:12 AM	Bypass valve closed
11/14/2012	10:04:12 AM	Bubbler valve closed
11/14/2012	10:04:12 AM	Main Vac valve opened
11/14/2012	10:04:12 AM	Helium MFC set to  0.000000
11/14/2012	10:04:12 AM	H2 MFC set to  0.000000
11/14/2012	10:04:12 AM	BCl3 MFC set to  0.000000
11/14/2012	10:04:12 AM	PH3 MFC set to  0.000000
11/14/2012	10:04:12 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:04:12 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:04:12 AM	Tube furnace set to 200
11/14/2012	10:04:42 AM	H2 valve closed
11/14/2012	10:04:42 AM	BCl3 valve closed
11/14/2012	10:04:42 AM	PH3 valve closed
11/14/2012	10:04:42 AM	SiCl4 pre valve closed
11/14/2012	10:04:42 AM	SiCl4 post valve closed
11/14/2012	10:04:42 AM	Bypass valve closed
11/14/2012	10:04:42 AM	Bubbler valve closed
11/14/2012	10:04:42 AM	Helium valve opened
11/14/2012	10:04:42 AM	Main Vac valve opened
11/14/2012	10:04:42 AM	Helium MFC set to  20.000000
11/14/2012	10:04:42 AM	H2 MFC set to  0.000000
11/14/2012	10:04:42 AM	BCl3 MFC set to  0.000000
11/14/2012	10:04:42 AM	PH3 MFC set to  0.000000
11/14/2012	10:04:42 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:04:42 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:04:42 AM	Tube furnace set to 200
11/14/2012	10:05:12 AM	Helium valve closed
11/14/2012	10:05:12 AM	H2 valve closed
11/14/2012	10:05:12 AM	BCl3 valve closed
11/14/2012	10:05:12 AM	PH3 valve closed
11/14/2012	10:05:12 AM	SiCl4 pre valve closed
11/14/2012	10:05:12 AM	SiCl4 post valve closed
11/14/2012	10:05:12 AM	Bypass valve closed
11/14/2012	10:05:12 AM	Bubbler valve closed
11/14/2012	10:05:12 AM	Main Vac valve opened
11/14/2012	10:05:12 AM	Helium MFC set to  0.000000
11/14/2012	10:05:12 AM	H2 MFC set to  0.000000
11/14/2012	10:05:12 AM	BCl3 MFC set to  0.000000
11/14/2012	10:05:12 AM	PH3 MFC set to  0.000000
11/14/2012	10:05:12 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:05:12 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:05:13 AM	Tube furnace set to 200
11/14/2012	10:05:43 AM	H2 valve closed
11/14/2012	10:05:43 AM	BCl3 valve closed
11/14/2012	10:05:43 AM	PH3 valve closed
11/14/2012	10:05:43 AM	SiCl4 pre valve closed
11/14/2012	10:05:43 AM	SiCl4 post valve closed
11/14/2012	10:05:43 AM	Bypass valve closed
11/14/2012	10:05:43 AM	Bubbler valve closed
11/14/2012	10:05:43 AM	Helium valve opened
11/14/2012	10:05:43 AM	Main Vac valve opened
11/14/2012	10:05:43 AM	Helium MFC set to  20.000000
11/14/2012	10:05:43 AM	H2 MFC set to  0.000000
11/14/2012	10:05:43 AM	BCl3 MFC set to  0.000000
11/14/2012	10:05:43 AM	PH3 MFC set to  0.000000
11/14/2012	10:05:43 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:05:43 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:05:43 AM	Tube furnace set to 200
11/14/2012	10:06:13 AM	Helium valve closed
11/14/2012	10:06:13 AM	H2 valve closed
11/14/2012	10:06:13 AM	BCl3 valve closed
11/14/2012	10:06:13 AM	PH3 valve closed
11/14/2012	10:06:13 AM	SiCl4 pre valve closed
11/14/2012	10:06:13 AM	SiCl4 post valve closed
11/14/2012	10:06:13 AM	Bypass valve closed
11/14/2012	10:06:13 AM	Bubbler valve closed
11/14/2012	10:06:13 AM	Main Vac valve opened
11/14/2012	10:06:13 AM	Helium MFC set to  0.000000
11/14/2012	10:06:13 AM	H2 MFC set to  0.000000
11/14/2012	10:06:13 AM	BCl3 MFC set to  0.000000
11/14/2012	10:06:13 AM	PH3 MFC set to  0.000000
11/14/2012	10:06:13 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:06:13 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:06:13 AM	Tube furnace set to 200
11/14/2012	10:06:43 AM	H2 valve closed
11/14/2012	10:06:43 AM	BCl3 valve closed
11/14/2012	10:06:43 AM	PH3 valve closed
11/14/2012	10:06:43 AM	SiCl4 pre valve closed
11/14/2012	10:06:43 AM	SiCl4 post valve closed
11/14/2012	10:06:43 AM	Bypass valve closed
11/14/2012	10:06:43 AM	Bubbler valve closed
11/14/2012	10:06:43 AM	Helium valve opened
11/14/2012	10:06:43 AM	Main Vac valve opened
11/14/2012	10:06:43 AM	Helium MFC set to  20.000000
11/14/2012	10:06:43 AM	H2 MFC set to  0.000000
11/14/2012	10:06:43 AM	BCl3 MFC set to  0.000000
11/14/2012	10:06:43 AM	PH3 MFC set to  0.000000
11/14/2012	10:06:43 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:06:43 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:06:43 AM	Tube furnace set to 200
11/14/2012	10:07:13 AM	Helium valve closed
11/14/2012	10:07:13 AM	H2 valve closed
11/14/2012	10:07:13 AM	BCl3 valve closed
11/14/2012	10:07:13 AM	PH3 valve closed
11/14/2012	10:07:13 AM	SiCl4 pre valve closed
11/14/2012	10:07:13 AM	SiCl4 post valve closed
11/14/2012	10:07:13 AM	Bypass valve closed
11/14/2012	10:07:13 AM	Bubbler valve closed
11/14/2012	10:07:13 AM	Main Vac valve opened
11/14/2012	10:07:13 AM	Helium MFC set to  0.000000
11/14/2012	10:07:13 AM	H2 MFC set to  0.000000
11/14/2012	10:07:13 AM	BCl3 MFC set to  0.000000
11/14/2012	10:07:13 AM	PH3 MFC set to  0.000000
11/14/2012	10:07:13 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:07:13 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:07:14 AM	Tube furnace set to 200
11/14/2012	10:07:44 AM	H2 valve closed
11/14/2012	10:07:44 AM	BCl3 valve closed
11/14/2012	10:07:44 AM	PH3 valve closed
11/14/2012	10:07:44 AM	SiCl4 pre valve closed
11/14/2012	10:07:44 AM	SiCl4 post valve closed
11/14/2012	10:07:44 AM	Bypass valve closed
11/14/2012	10:07:44 AM	Bubbler valve closed
11/14/2012	10:07:44 AM	Helium valve opened
11/14/2012	10:07:44 AM	Main Vac valve opened
11/14/2012	10:07:44 AM	Helium MFC set to  20.000000
11/14/2012	10:07:44 AM	H2 MFC set to  0.000000
11/14/2012	10:07:44 AM	BCl3 MFC set to  0.000000
11/14/2012	10:07:44 AM	PH3 MFC set to  0.000000
11/14/2012	10:07:44 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:07:44 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:07:44 AM	Tube furnace set to 200
11/14/2012	10:08:14 AM	Helium valve closed
11/14/2012	10:08:14 AM	H2 valve closed
11/14/2012	10:08:14 AM	BCl3 valve closed
11/14/2012	10:08:14 AM	PH3 valve closed
11/14/2012	10:08:14 AM	SiCl4 pre valve closed
11/14/2012	10:08:14 AM	SiCl4 post valve closed
11/14/2012	10:08:14 AM	Bypass valve closed
11/14/2012	10:08:14 AM	Bubbler valve closed
11/14/2012	10:08:14 AM	Main Vac valve opened
11/14/2012	10:08:14 AM	Helium MFC set to  0.000000
11/14/2012	10:08:14 AM	H2 MFC set to  0.000000
11/14/2012	10:08:14 AM	BCl3 MFC set to  0.000000
11/14/2012	10:08:14 AM	PH3 MFC set to  0.000000
11/14/2012	10:08:14 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:08:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:08:14 AM	Tube furnace set to 200
11/14/2012	10:08:44 AM	H2 valve closed
11/14/2012	10:08:44 AM	BCl3 valve closed
11/14/2012	10:08:44 AM	PH3 valve closed
11/14/2012	10:08:44 AM	SiCl4 pre valve closed
11/14/2012	10:08:44 AM	SiCl4 post valve closed
11/14/2012	10:08:44 AM	Bypass valve closed
11/14/2012	10:08:44 AM	Bubbler valve closed
11/14/2012	10:08:44 AM	Helium valve opened
11/14/2012	10:08:44 AM	Main Vac valve opened
11/14/2012	10:08:44 AM	Helium MFC set to  20.000000
11/14/2012	10:08:44 AM	H2 MFC set to  0.000000
11/14/2012	10:08:44 AM	BCl3 MFC set to  0.000000
11/14/2012	10:08:44 AM	PH3 MFC set to  0.000000
11/14/2012	10:08:44 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:08:44 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:08:44 AM	Tube furnace set to 200
11/14/2012	10:09:14 AM	Helium valve closed
11/14/2012	10:09:14 AM	H2 valve closed
11/14/2012	10:09:14 AM	BCl3 valve closed
11/14/2012	10:09:14 AM	PH3 valve closed
11/14/2012	10:09:14 AM	SiCl4 pre valve closed
11/14/2012	10:09:14 AM	SiCl4 post valve closed
11/14/2012	10:09:14 AM	Bypass valve closed
11/14/2012	10:09:14 AM	Bubbler valve closed
11/14/2012	10:09:14 AM	Main Vac valve opened
11/14/2012	10:09:14 AM	Helium MFC set to  0.000000
11/14/2012	10:09:14 AM	H2 MFC set to  0.000000
11/14/2012	10:09:14 AM	BCl3 MFC set to  0.000000
11/14/2012	10:09:14 AM	PH3 MFC set to  0.000000
11/14/2012	10:09:14 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:09:14 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:09:14 AM	Tube furnace set to 0
11/14/2012	10:09:15 AM	Run finished at 10:09 AM
11/14/2012	10:32:54 AM	Main Vac valve closed
11/14/2012	10:33:11 AM	Main Vac valve opened
11/14/2012	10:34:27 AM	Recipe started at 10:34 AM
11/14/2012	10:34:27 AM	Helium valve closed
11/14/2012	10:34:27 AM	H2 valve closed
11/14/2012	10:34:27 AM	BCl3 valve closed
11/14/2012	10:34:27 AM	PH3 valve closed
11/14/2012	10:34:27 AM	SiCl4 pre valve closed
11/14/2012	10:34:27 AM	SiCl4 post valve closed
11/14/2012	10:34:27 AM	Main Vac valve closed
11/14/2012	10:34:27 AM	Bypass valve closed
11/14/2012	10:34:28 AM	Bubbler valve closed
11/14/2012	10:34:28 AM	Helium MFC set to  0.000000
11/14/2012	10:34:28 AM	H2 MFC set to  0.000000
11/14/2012	10:34:28 AM	BCl3 MFC set to  0.000000
11/14/2012	10:34:28 AM	PH3 MFC set to  0.000000
11/14/2012	10:34:28 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:34:28 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:34:28 AM	Tube furnace set to 0
11/14/2012	10:34:31 AM	Helium valve closed
11/14/2012	10:34:31 AM	BCl3 valve closed
11/14/2012	10:34:31 AM	PH3 valve closed
11/14/2012	10:34:31 AM	SiCl4 pre valve closed
11/14/2012	10:34:31 AM	SiCl4 post valve closed
11/14/2012	10:34:31 AM	Main Vac valve closed
11/14/2012	10:34:31 AM	Bypass valve closed
11/14/2012	10:34:31 AM	Bubbler valve closed
11/14/2012	10:34:31 AM	H2 valve opened
11/14/2012	10:34:31 AM	Helium MFC set to  0.000000
11/14/2012	10:34:31 AM	H2 MFC set to  500.000000
11/14/2012	10:34:31 AM	BCl3 MFC set to  0.000000
11/14/2012	10:34:31 AM	PH3 MFC set to  0.000000
11/14/2012	10:34:31 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:34:31 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:34:31 AM	Tube furnace set to 0
11/14/2012	10:35:45 AM	Helium valve closed
11/14/2012	10:35:45 AM	BCl3 valve closed
11/14/2012	10:35:45 AM	PH3 valve closed
11/14/2012	10:35:45 AM	SiCl4 pre valve closed
11/14/2012	10:35:45 AM	SiCl4 post valve closed
11/14/2012	10:35:45 AM	Main Vac valve closed
11/14/2012	10:35:45 AM	Bypass valve closed
11/14/2012	10:35:45 AM	H2 valve opened
11/14/2012	10:35:45 AM	Bubbler valve opened
11/14/2012	10:35:45 AM	Helium MFC set to  0.000000
11/14/2012	10:35:45 AM	H2 MFC set to  500.000000
11/14/2012	10:35:45 AM	BCl3 MFC set to  0.000000
11/14/2012	10:35:45 AM	PH3 MFC set to  0.000000
11/14/2012	10:35:45 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:35:45 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:35:45 AM	Tube furnace set to 0
11/14/2012	10:35:46 AM	Helium valve closed
11/14/2012	10:35:46 AM	BCl3 valve closed
11/14/2012	10:35:46 AM	PH3 valve closed
11/14/2012	10:35:46 AM	SiCl4 pre valve closed
11/14/2012	10:35:46 AM	SiCl4 post valve closed
11/14/2012	10:35:46 AM	Main Vac valve closed
11/14/2012	10:35:46 AM	Bypass valve closed
11/14/2012	10:35:46 AM	H2 valve opened
11/14/2012	10:35:46 AM	Bubbler valve opened
11/14/2012	10:35:46 AM	Helium MFC set to  0.000000
11/14/2012	10:35:46 AM	H2 MFC set to  500.000000
11/14/2012	10:35:46 AM	BCl3 MFC set to  0.000000
11/14/2012	10:35:46 AM	PH3 MFC set to  0.000000
11/14/2012	10:35:46 AM	SiCl4 MFC set to  0.000000
11/14/2012	10:35:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:35:46 AM	Tube furnace set to 1000
11/14/2012	10:55:46 AM	Helium valve closed
11/14/2012	10:55:46 AM	PH3 valve closed
11/14/2012	10:55:46 AM	Main Vac valve closed
11/14/2012	10:55:46 AM	Bypass valve closed
11/14/2012	10:55:46 AM	H2 valve opened
11/14/2012	10:55:46 AM	BCl3 valve opened
11/14/2012	10:55:46 AM	SiCl4 pre valve opened
11/14/2012	10:55:46 AM	SiCl4 post valve opened
11/14/2012	10:55:46 AM	Bubbler valve opened
11/14/2012	10:55:46 AM	Helium MFC set to  0.000000
11/14/2012	10:55:46 AM	H2 MFC set to  450.000000
11/14/2012	10:55:46 AM	BCl3 MFC set to  1.300000
11/14/2012	10:55:46 AM	PH3 MFC set to  0.000000
11/14/2012	10:55:46 AM	SiCl4 MFC set to  50.000000
11/14/2012	10:55:46 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	10:55:46 AM	Tube furnace set to 1000
11/14/2012	11:09:46 AM	Helium valve closed
11/14/2012	11:09:46 AM	BCl3 valve closed
11/14/2012	11:09:46 AM	PH3 valve closed
11/14/2012	11:09:46 AM	SiCl4 pre valve closed
11/14/2012	11:09:46 AM	SiCl4 post valve closed
11/14/2012	11:09:46 AM	Main Vac valve closed
11/14/2012	11:09:46 AM	Bypass valve closed
11/14/2012	11:09:46 AM	H2 valve opened
11/14/2012	11:09:46 AM	Bubbler valve opened
11/14/2012	11:09:46 AM	Helium MFC set to  0.000000
11/14/2012	11:09:46 AM	H2 MFC set to  500.000000
11/14/2012	11:09:46 AM	BCl3 MFC set to  0.000000
11/14/2012	11:09:46 AM	PH3 MFC set to  0.000000
11/14/2012	11:09:46 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:09:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:09:47 AM	Tube furnace set to 950
11/14/2012	11:11:47 AM	Helium valve closed
11/14/2012	11:11:47 AM	BCl3 valve closed
11/14/2012	11:11:47 AM	PH3 valve closed
11/14/2012	11:11:47 AM	SiCl4 pre valve closed
11/14/2012	11:11:47 AM	SiCl4 post valve closed
11/14/2012	11:11:47 AM	Main Vac valve closed
11/14/2012	11:11:47 AM	Bypass valve closed
11/14/2012	11:11:47 AM	H2 valve opened
11/14/2012	11:11:47 AM	Bubbler valve opened
11/14/2012	11:11:47 AM	Helium MFC set to  0.000000
11/14/2012	11:11:47 AM	H2 MFC set to  500.000000
11/14/2012	11:11:47 AM	BCl3 MFC set to  0.000000
11/14/2012	11:11:47 AM	PH3 MFC set to  0.000000
11/14/2012	11:11:47 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:11:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:11:47 AM	Tube furnace set to 900
11/14/2012	11:13:47 AM	Helium valve closed
11/14/2012	11:13:47 AM	BCl3 valve closed
11/14/2012	11:13:47 AM	PH3 valve closed
11/14/2012	11:13:47 AM	SiCl4 pre valve closed
11/14/2012	11:13:47 AM	SiCl4 post valve closed
11/14/2012	11:13:47 AM	Main Vac valve closed
11/14/2012	11:13:47 AM	Bypass valve closed
11/14/2012	11:13:47 AM	H2 valve opened
11/14/2012	11:13:47 AM	Bubbler valve opened
11/14/2012	11:13:47 AM	Helium MFC set to  0.000000
11/14/2012	11:13:47 AM	H2 MFC set to  500.000000
11/14/2012	11:13:47 AM	BCl3 MFC set to  0.000000
11/14/2012	11:13:47 AM	PH3 MFC set to  0.000000
11/14/2012	11:13:47 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:13:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:13:47 AM	Tube furnace set to 850
11/14/2012	11:15:47 AM	H2 valve closed
11/14/2012	11:15:47 AM	BCl3 valve closed
11/14/2012	11:15:47 AM	PH3 valve closed
11/14/2012	11:15:47 AM	SiCl4 pre valve closed
11/14/2012	11:15:47 AM	SiCl4 post valve closed
11/14/2012	11:15:47 AM	Main Vac valve closed
11/14/2012	11:15:47 AM	Bypass valve closed
11/14/2012	11:15:47 AM	Helium valve opened
11/14/2012	11:15:47 AM	Bubbler valve opened
11/14/2012	11:15:47 AM	Helium MFC set to  500.000000
11/14/2012	11:15:47 AM	H2 MFC set to  0.000000
11/14/2012	11:15:47 AM	BCl3 MFC set to  0.000000
11/14/2012	11:15:47 AM	PH3 MFC set to  0.000000
11/14/2012	11:15:47 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:15:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:15:47 AM	Tube furnace set to 800
11/14/2012	11:17:47 AM	H2 valve closed
11/14/2012	11:17:47 AM	BCl3 valve closed
11/14/2012	11:17:47 AM	PH3 valve closed
11/14/2012	11:17:47 AM	SiCl4 pre valve closed
11/14/2012	11:17:47 AM	SiCl4 post valve closed
11/14/2012	11:17:47 AM	Main Vac valve closed
11/14/2012	11:17:47 AM	Bypass valve closed
11/14/2012	11:17:47 AM	Helium valve opened
11/14/2012	11:17:47 AM	Bubbler valve opened
11/14/2012	11:17:47 AM	Helium MFC set to  500.000000
11/14/2012	11:17:47 AM	H2 MFC set to  0.000000
11/14/2012	11:17:47 AM	BCl3 MFC set to  0.000000
11/14/2012	11:17:47 AM	PH3 MFC set to  0.000000
11/14/2012	11:17:47 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:17:47 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:17:48 AM	Tube furnace set to 750
11/14/2012	11:19:48 AM	H2 valve closed
11/14/2012	11:19:48 AM	BCl3 valve closed
11/14/2012	11:19:48 AM	PH3 valve closed
11/14/2012	11:19:48 AM	SiCl4 pre valve closed
11/14/2012	11:19:48 AM	SiCl4 post valve closed
11/14/2012	11:19:48 AM	Main Vac valve closed
11/14/2012	11:19:48 AM	Bypass valve closed
11/14/2012	11:19:48 AM	Helium valve opened
11/14/2012	11:19:48 AM	Bubbler valve opened
11/14/2012	11:19:48 AM	Helium MFC set to  500.000000
11/14/2012	11:19:48 AM	H2 MFC set to  0.000000
11/14/2012	11:19:48 AM	BCl3 MFC set to  0.000000
11/14/2012	11:19:48 AM	PH3 MFC set to  0.000000
11/14/2012	11:19:48 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:19:48 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:19:48 AM	Tube furnace set to 0
11/14/2012	11:39:48 AM	Helium valve closed
11/14/2012	11:39:48 AM	H2 valve closed
11/14/2012	11:39:48 AM	BCl3 valve closed
11/14/2012	11:39:48 AM	PH3 valve closed
11/14/2012	11:39:48 AM	SiCl4 pre valve closed
11/14/2012	11:39:48 AM	SiCl4 post valve closed
11/14/2012	11:39:48 AM	Main Vac valve closed
11/14/2012	11:39:48 AM	Bypass valve closed
11/14/2012	11:39:48 AM	Bubbler valve closed
11/14/2012	11:39:48 AM	Helium MFC set to  0.000000
11/14/2012	11:39:48 AM	H2 MFC set to  0.000000
11/14/2012	11:39:48 AM	BCl3 MFC set to  0.000000
11/14/2012	11:39:48 AM	PH3 MFC set to  0.000000
11/14/2012	11:39:48 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:39:48 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:39:48 AM	Tube furnace set to 0
11/14/2012	11:39:49 AM	Helium valve closed
11/14/2012	11:39:49 AM	H2 valve closed
11/14/2012	11:39:49 AM	BCl3 valve closed
11/14/2012	11:39:49 AM	PH3 valve closed
11/14/2012	11:39:49 AM	SiCl4 pre valve closed
11/14/2012	11:39:49 AM	SiCl4 post valve closed
11/14/2012	11:39:49 AM	Main Vac valve closed
11/14/2012	11:39:49 AM	Bubbler valve closed
11/14/2012	11:39:49 AM	Bypass valve opened
11/14/2012	11:39:49 AM	Helium MFC set to  0.000000
11/14/2012	11:39:49 AM	H2 MFC set to  0.000000
11/14/2012	11:39:49 AM	BCl3 MFC set to  0.000000
11/14/2012	11:39:49 AM	PH3 MFC set to  0.000000
11/14/2012	11:39:49 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:39:49 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:39:49 AM	Tube furnace set to 0
11/14/2012	11:40:42 AM	Helium valve closed
11/14/2012	11:40:42 AM	H2 valve closed
11/14/2012	11:40:42 AM	BCl3 valve closed
11/14/2012	11:40:42 AM	PH3 valve closed
11/14/2012	11:40:42 AM	SiCl4 pre valve closed
11/14/2012	11:40:42 AM	SiCl4 post valve closed
11/14/2012	11:40:42 AM	Main Vac valve closed
11/14/2012	11:40:42 AM	Bubbler valve closed
11/14/2012	11:40:42 AM	Bypass valve opened
11/14/2012	11:40:42 AM	Helium MFC set to  0.000000
11/14/2012	11:40:42 AM	H2 MFC set to  0.000000
11/14/2012	11:40:42 AM	BCl3 MFC set to  0.000000
11/14/2012	11:40:42 AM	PH3 MFC set to  0.000000
11/14/2012	11:40:42 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:40:42 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:40:43 AM	Tube furnace set to 0
11/14/2012	11:41:43 AM	Helium valve closed
11/14/2012	11:41:43 AM	H2 valve closed
11/14/2012	11:41:43 AM	BCl3 valve closed
11/14/2012	11:41:43 AM	PH3 valve closed
11/14/2012	11:41:43 AM	SiCl4 pre valve closed
11/14/2012	11:41:43 AM	SiCl4 post valve closed
11/14/2012	11:41:43 AM	Bypass valve closed
11/14/2012	11:41:43 AM	Bubbler valve closed
11/14/2012	11:41:43 AM	Main Vac valve opened
11/14/2012	11:41:43 AM	Helium MFC set to  0.000000
11/14/2012	11:41:43 AM	H2 MFC set to  0.000000
11/14/2012	11:41:43 AM	BCl3 MFC set to  0.000000
11/14/2012	11:41:43 AM	PH3 MFC set to  0.000000
11/14/2012	11:41:43 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:41:43 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:41:43 AM	Tube furnace set to 0
11/14/2012	11:41:44 AM	Run finished at 11:41 AM
11/14/2012	11:46:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	11:46:54 AM	Recipe started at 11:46 AM
11/14/2012	11:46:54 AM	Helium valve closed
11/14/2012	11:46:54 AM	H2 valve closed
11/14/2012	11:46:54 AM	BCl3 valve closed
11/14/2012	11:46:54 AM	PH3 valve closed
11/14/2012	11:46:54 AM	SiCl4 pre valve closed
11/14/2012	11:46:54 AM	SiCl4 post valve closed
11/14/2012	11:46:54 AM	Main Vac valve closed
11/14/2012	11:46:54 AM	Bypass valve closed
11/14/2012	11:46:54 AM	Bubbler valve closed
11/14/2012	11:46:54 AM	Helium MFC set to  0.000000
11/14/2012	11:46:54 AM	H2 MFC set to  0.000000
11/14/2012	11:46:54 AM	BCl3 MFC set to  0.000000
11/14/2012	11:46:54 AM	PH3 MFC set to  0.000000
11/14/2012	11:46:54 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:46:54 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:46:54 AM	Tube furnace set to 0
11/14/2012	11:46:57 AM	H2 valve closed
11/14/2012	11:46:57 AM	BCl3 valve closed
11/14/2012	11:46:57 AM	PH3 valve closed
11/14/2012	11:46:57 AM	SiCl4 pre valve closed
11/14/2012	11:46:57 AM	SiCl4 post valve closed
11/14/2012	11:46:57 AM	Main Vac valve closed
11/14/2012	11:46:57 AM	Bypass valve closed
11/14/2012	11:46:57 AM	Bubbler valve closed
11/14/2012	11:46:57 AM	Helium valve opened
11/14/2012	11:46:57 AM	Helium MFC set to  500.000000
11/14/2012	11:46:57 AM	H2 MFC set to  0.000000
11/14/2012	11:46:57 AM	BCl3 MFC set to  0.000000
11/14/2012	11:46:57 AM	PH3 MFC set to  0.000000
11/14/2012	11:46:57 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:46:57 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:46:57 AM	Tube furnace set to 0
11/14/2012	11:48:07 AM	Helium valve closed
11/14/2012	11:48:07 AM	H2 valve closed
11/14/2012	11:48:07 AM	BCl3 valve closed
11/14/2012	11:48:07 AM	PH3 valve closed
11/14/2012	11:48:07 AM	SiCl4 pre valve closed
11/14/2012	11:48:07 AM	SiCl4 post valve closed
11/14/2012	11:48:07 AM	Main Vac valve closed
11/14/2012	11:48:07 AM	Bypass valve closed
11/14/2012	11:48:07 AM	Bubbler valve closed
11/14/2012	11:48:07 AM	Helium MFC set to  0.000000
11/14/2012	11:48:07 AM	H2 MFC set to  0.000000
11/14/2012	11:48:07 AM	BCl3 MFC set to  0.000000
11/14/2012	11:48:07 AM	PH3 MFC set to  0.000000
11/14/2012	11:48:07 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:48:07 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:48:07 AM	Tube furnace set to 0
11/14/2012	11:48:08 AM	Run finished at 11:48 AM
11/14/2012	11:48:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	11:50:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	11:50:29 AM	Recipe started at 11:50 AM
11/14/2012	11:50:29 AM	Helium valve closed
11/14/2012	11:50:29 AM	H2 valve closed
11/14/2012	11:50:29 AM	BCl3 valve closed
11/14/2012	11:50:29 AM	PH3 valve closed
11/14/2012	11:50:29 AM	SiCl4 pre valve closed
11/14/2012	11:50:29 AM	SiCl4 post valve closed
11/14/2012	11:50:29 AM	Main Vac valve closed
11/14/2012	11:50:29 AM	Bubbler valve closed
11/14/2012	11:50:29 AM	Bypass valve opened
11/14/2012	11:50:29 AM	Helium MFC set to  0.000000
11/14/2012	11:50:29 AM	H2 MFC set to  0.000000
11/14/2012	11:50:29 AM	BCl3 MFC set to  0.000000
11/14/2012	11:50:29 AM	PH3 MFC set to  0.000000
11/14/2012	11:50:29 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:50:29 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:50:29 AM	Tube furnace set to 0
11/14/2012	11:51:34 AM	Helium valve closed
11/14/2012	11:51:34 AM	H2 valve closed
11/14/2012	11:51:34 AM	BCl3 valve closed
11/14/2012	11:51:34 AM	PH3 valve closed
11/14/2012	11:51:34 AM	SiCl4 pre valve closed
11/14/2012	11:51:34 AM	SiCl4 post valve closed
11/14/2012	11:51:34 AM	Main Vac valve closed
11/14/2012	11:51:34 AM	Bubbler valve closed
11/14/2012	11:51:34 AM	Bypass valve opened
11/14/2012	11:51:34 AM	Helium MFC set to  0.000000
11/14/2012	11:51:34 AM	H2 MFC set to  0.000000
11/14/2012	11:51:34 AM	BCl3 MFC set to  0.000000
11/14/2012	11:51:34 AM	PH3 MFC set to  0.000000
11/14/2012	11:51:34 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:51:34 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:51:35 AM	Tube furnace set to 0
11/14/2012	11:52:35 AM	Helium valve closed
11/14/2012	11:52:35 AM	H2 valve closed
11/14/2012	11:52:35 AM	BCl3 valve closed
11/14/2012	11:52:35 AM	PH3 valve closed
11/14/2012	11:52:35 AM	SiCl4 pre valve closed
11/14/2012	11:52:35 AM	SiCl4 post valve closed
11/14/2012	11:52:35 AM	Bypass valve closed
11/14/2012	11:52:35 AM	Bubbler valve closed
11/14/2012	11:52:35 AM	Main Vac valve opened
11/14/2012	11:52:35 AM	Helium MFC set to  0.000000
11/14/2012	11:52:35 AM	H2 MFC set to  0.000000
11/14/2012	11:52:35 AM	BCl3 MFC set to  0.000000
11/14/2012	11:52:35 AM	PH3 MFC set to  0.000000
11/14/2012	11:52:35 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:52:35 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:52:35 AM	Tube furnace set to 0
11/14/2012	11:52:36 AM	Run finished at 11:52 AM
11/14/2012	11:52:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	11:58:53 AM	Recipe started at 11:58 AM
11/14/2012	11:58:53 AM	Helium valve closed
11/14/2012	11:58:53 AM	H2 valve closed
11/14/2012	11:58:53 AM	BCl3 valve closed
11/14/2012	11:58:53 AM	PH3 valve closed
11/14/2012	11:58:53 AM	SiCl4 pre valve closed
11/14/2012	11:58:53 AM	SiCl4 post valve closed
11/14/2012	11:58:53 AM	Bypass valve closed
11/14/2012	11:58:53 AM	Bubbler valve closed
11/14/2012	11:58:53 AM	Main Vac valve opened
11/14/2012	11:58:53 AM	Helium MFC set to  0.000000
11/14/2012	11:58:54 AM	H2 MFC set to  0.000000
11/14/2012	11:58:54 AM	BCl3 MFC set to  0.000000
11/14/2012	11:58:54 AM	PH3 MFC set to  0.000000
11/14/2012	11:58:54 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:58:54 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:58:54 AM	Tube furnace set to 0
11/14/2012	11:59:24 AM	H2 valve closed
11/14/2012	11:59:24 AM	BCl3 valve closed
11/14/2012	11:59:24 AM	PH3 valve closed
11/14/2012	11:59:24 AM	SiCl4 pre valve closed
11/14/2012	11:59:24 AM	SiCl4 post valve closed
11/14/2012	11:59:24 AM	Bypass valve closed
11/14/2012	11:59:24 AM	Bubbler valve closed
11/14/2012	11:59:24 AM	Helium valve opened
11/14/2012	11:59:24 AM	Main Vac valve opened
11/14/2012	11:59:24 AM	Helium MFC set to  20.000000
11/14/2012	11:59:24 AM	H2 MFC set to  0.000000
11/14/2012	11:59:24 AM	BCl3 MFC set to  0.000000
11/14/2012	11:59:24 AM	PH3 MFC set to  0.000000
11/14/2012	11:59:24 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:59:24 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:59:24 AM	Tube furnace set to 0
11/14/2012	11:59:54 AM	Helium valve closed
11/14/2012	11:59:54 AM	H2 valve closed
11/14/2012	11:59:54 AM	BCl3 valve closed
11/14/2012	11:59:54 AM	PH3 valve closed
11/14/2012	11:59:54 AM	SiCl4 pre valve closed
11/14/2012	11:59:54 AM	SiCl4 post valve closed
11/14/2012	11:59:54 AM	Bypass valve closed
11/14/2012	11:59:54 AM	Bubbler valve closed
11/14/2012	11:59:54 AM	Main Vac valve opened
11/14/2012	11:59:54 AM	Helium MFC set to  0.000000
11/14/2012	11:59:54 AM	H2 MFC set to  0.000000
11/14/2012	11:59:54 AM	BCl3 MFC set to  0.000000
11/14/2012	11:59:54 AM	PH3 MFC set to  0.000000
11/14/2012	11:59:54 AM	SiCl4 MFC set to  0.000000
11/14/2012	11:59:54 AM	Bypass solenoid MFC set to  0.000000
11/14/2012	11:59:54 AM	Tube furnace set to 0
11/14/2012	12:00:24 PM	H2 valve closed
11/14/2012	12:00:24 PM	BCl3 valve closed
11/14/2012	12:00:24 PM	PH3 valve closed
11/14/2012	12:00:24 PM	SiCl4 pre valve closed
11/14/2012	12:00:24 PM	SiCl4 post valve closed
11/14/2012	12:00:24 PM	Bypass valve closed
11/14/2012	12:00:24 PM	Bubbler valve closed
11/14/2012	12:00:24 PM	Helium valve opened
11/14/2012	12:00:24 PM	Main Vac valve opened
11/14/2012	12:00:24 PM	Helium MFC set to  20.000000
11/14/2012	12:00:24 PM	H2 MFC set to  0.000000
11/14/2012	12:00:24 PM	BCl3 MFC set to  0.000000
11/14/2012	12:00:24 PM	PH3 MFC set to  0.000000
11/14/2012	12:00:24 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:00:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:00:24 PM	Tube furnace set to 0
11/14/2012	12:00:54 PM	Helium valve closed
11/14/2012	12:00:54 PM	H2 valve closed
11/14/2012	12:00:54 PM	BCl3 valve closed
11/14/2012	12:00:54 PM	PH3 valve closed
11/14/2012	12:00:54 PM	SiCl4 pre valve closed
11/14/2012	12:00:54 PM	SiCl4 post valve closed
11/14/2012	12:00:54 PM	Bypass valve closed
11/14/2012	12:00:54 PM	Bubbler valve closed
11/14/2012	12:00:54 PM	Main Vac valve opened
11/14/2012	12:00:54 PM	Helium MFC set to  0.000000
11/14/2012	12:00:54 PM	H2 MFC set to  0.000000
11/14/2012	12:00:54 PM	BCl3 MFC set to  0.000000
11/14/2012	12:00:54 PM	PH3 MFC set to  0.000000
11/14/2012	12:00:54 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:00:54 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:00:55 PM	Tube furnace set to 0
11/14/2012	12:01:25 PM	H2 valve closed
11/14/2012	12:01:25 PM	BCl3 valve closed
11/14/2012	12:01:25 PM	PH3 valve closed
11/14/2012	12:01:25 PM	SiCl4 pre valve closed
11/14/2012	12:01:25 PM	SiCl4 post valve closed
11/14/2012	12:01:25 PM	Bypass valve closed
11/14/2012	12:01:25 PM	Bubbler valve closed
11/14/2012	12:01:25 PM	Helium valve opened
11/14/2012	12:01:25 PM	Main Vac valve opened
11/14/2012	12:01:25 PM	Helium MFC set to  20.000000
11/14/2012	12:01:25 PM	H2 MFC set to  0.000000
11/14/2012	12:01:25 PM	BCl3 MFC set to  0.000000
11/14/2012	12:01:25 PM	PH3 MFC set to  0.000000
11/14/2012	12:01:25 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:01:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:01:25 PM	Tube furnace set to 0
11/14/2012	12:01:55 PM	Helium valve closed
11/14/2012	12:01:55 PM	H2 valve closed
11/14/2012	12:01:55 PM	BCl3 valve closed
11/14/2012	12:01:55 PM	PH3 valve closed
11/14/2012	12:01:55 PM	SiCl4 pre valve closed
11/14/2012	12:01:55 PM	SiCl4 post valve closed
11/14/2012	12:01:55 PM	Bypass valve closed
11/14/2012	12:01:55 PM	Bubbler valve closed
11/14/2012	12:01:55 PM	Main Vac valve opened
11/14/2012	12:01:55 PM	Helium MFC set to  0.000000
11/14/2012	12:01:55 PM	H2 MFC set to  0.000000
11/14/2012	12:01:55 PM	BCl3 MFC set to  0.000000
11/14/2012	12:01:55 PM	PH3 MFC set to  0.000000
11/14/2012	12:01:55 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:01:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:01:55 PM	Tube furnace set to 0
11/14/2012	12:02:25 PM	H2 valve closed
11/14/2012	12:02:25 PM	BCl3 valve closed
11/14/2012	12:02:25 PM	PH3 valve closed
11/14/2012	12:02:25 PM	SiCl4 pre valve closed
11/14/2012	12:02:25 PM	SiCl4 post valve closed
11/14/2012	12:02:25 PM	Bypass valve closed
11/14/2012	12:02:25 PM	Bubbler valve closed
11/14/2012	12:02:25 PM	Helium valve opened
11/14/2012	12:02:25 PM	Main Vac valve opened
11/14/2012	12:02:25 PM	Helium MFC set to  20.000000
11/14/2012	12:02:25 PM	H2 MFC set to  0.000000
11/14/2012	12:02:25 PM	BCl3 MFC set to  0.000000
11/14/2012	12:02:25 PM	PH3 MFC set to  0.000000
11/14/2012	12:02:25 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:02:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:02:25 PM	Tube furnace set to 0
11/14/2012	12:02:55 PM	Helium valve closed
11/14/2012	12:02:55 PM	H2 valve closed
11/14/2012	12:02:55 PM	BCl3 valve closed
11/14/2012	12:02:55 PM	PH3 valve closed
11/14/2012	12:02:55 PM	SiCl4 pre valve closed
11/14/2012	12:02:55 PM	SiCl4 post valve closed
11/14/2012	12:02:55 PM	Bypass valve closed
11/14/2012	12:02:55 PM	Bubbler valve closed
11/14/2012	12:02:55 PM	Main Vac valve opened
11/14/2012	12:02:55 PM	Helium MFC set to  0.000000
11/14/2012	12:02:55 PM	H2 MFC set to  0.000000
11/14/2012	12:02:55 PM	BCl3 MFC set to  0.000000
11/14/2012	12:02:55 PM	PH3 MFC set to  0.000000
11/14/2012	12:02:55 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:02:55 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:02:56 PM	Tube furnace set to 0
11/14/2012	12:03:26 PM	H2 valve closed
11/14/2012	12:03:26 PM	BCl3 valve closed
11/14/2012	12:03:26 PM	PH3 valve closed
11/14/2012	12:03:26 PM	SiCl4 pre valve closed
11/14/2012	12:03:26 PM	SiCl4 post valve closed
11/14/2012	12:03:26 PM	Bypass valve closed
11/14/2012	12:03:26 PM	Bubbler valve closed
11/14/2012	12:03:26 PM	Helium valve opened
11/14/2012	12:03:26 PM	Main Vac valve opened
11/14/2012	12:03:26 PM	Helium MFC set to  20.000000
11/14/2012	12:03:26 PM	H2 MFC set to  0.000000
11/14/2012	12:03:26 PM	BCl3 MFC set to  0.000000
11/14/2012	12:03:26 PM	PH3 MFC set to  0.000000
11/14/2012	12:03:26 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:03:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:03:26 PM	Tube furnace set to 0
11/14/2012	12:03:56 PM	Helium valve closed
11/14/2012	12:03:56 PM	H2 valve closed
11/14/2012	12:03:56 PM	BCl3 valve closed
11/14/2012	12:03:56 PM	PH3 valve closed
11/14/2012	12:03:56 PM	SiCl4 pre valve closed
11/14/2012	12:03:56 PM	SiCl4 post valve closed
11/14/2012	12:03:56 PM	Bypass valve closed
11/14/2012	12:03:56 PM	Bubbler valve closed
11/14/2012	12:03:56 PM	Main Vac valve opened
11/14/2012	12:03:56 PM	Helium MFC set to  0.000000
11/14/2012	12:03:56 PM	H2 MFC set to  0.000000
11/14/2012	12:03:56 PM	BCl3 MFC set to  0.000000
11/14/2012	12:03:56 PM	PH3 MFC set to  0.000000
11/14/2012	12:03:56 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:03:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:03:56 PM	Tube furnace set to 0
11/14/2012	12:04:26 PM	H2 valve closed
11/14/2012	12:04:26 PM	BCl3 valve closed
11/14/2012	12:04:26 PM	PH3 valve closed
11/14/2012	12:04:26 PM	SiCl4 pre valve closed
11/14/2012	12:04:26 PM	SiCl4 post valve closed
11/14/2012	12:04:26 PM	Bypass valve closed
11/14/2012	12:04:26 PM	Bubbler valve closed
11/14/2012	12:04:26 PM	Helium valve opened
11/14/2012	12:04:26 PM	Main Vac valve opened
11/14/2012	12:04:26 PM	Helium MFC set to  20.000000
11/14/2012	12:04:26 PM	H2 MFC set to  0.000000
11/14/2012	12:04:26 PM	BCl3 MFC set to  0.000000
11/14/2012	12:04:26 PM	PH3 MFC set to  0.000000
11/14/2012	12:04:26 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:04:26 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:04:26 PM	Tube furnace set to 0
11/14/2012	12:04:56 PM	Helium valve closed
11/14/2012	12:04:56 PM	H2 valve closed
11/14/2012	12:04:56 PM	BCl3 valve closed
11/14/2012	12:04:56 PM	PH3 valve closed
11/14/2012	12:04:56 PM	SiCl4 pre valve closed
11/14/2012	12:04:56 PM	SiCl4 post valve closed
11/14/2012	12:04:56 PM	Bypass valve closed
11/14/2012	12:04:56 PM	Bubbler valve closed
11/14/2012	12:04:56 PM	Main Vac valve opened
11/14/2012	12:04:56 PM	Helium MFC set to  0.000000
11/14/2012	12:04:56 PM	H2 MFC set to  0.000000
11/14/2012	12:04:56 PM	BCl3 MFC set to  0.000000
11/14/2012	12:04:56 PM	PH3 MFC set to  0.000000
11/14/2012	12:04:56 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:04:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:04:57 PM	Tube furnace set to 0
11/14/2012	12:05:27 PM	H2 valve closed
11/14/2012	12:05:27 PM	BCl3 valve closed
11/14/2012	12:05:27 PM	PH3 valve closed
11/14/2012	12:05:27 PM	SiCl4 pre valve closed
11/14/2012	12:05:27 PM	SiCl4 post valve closed
11/14/2012	12:05:27 PM	Bypass valve closed
11/14/2012	12:05:27 PM	Bubbler valve closed
11/14/2012	12:05:27 PM	Helium valve opened
11/14/2012	12:05:27 PM	Main Vac valve opened
11/14/2012	12:05:27 PM	Helium MFC set to  20.000000
11/14/2012	12:05:27 PM	H2 MFC set to  0.000000
11/14/2012	12:05:27 PM	BCl3 MFC set to  0.000000
11/14/2012	12:05:27 PM	PH3 MFC set to  0.000000
11/14/2012	12:05:27 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:05:27 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:05:27 PM	Tube furnace set to 0
11/14/2012	12:05:57 PM	Helium valve closed
11/14/2012	12:05:57 PM	H2 valve closed
11/14/2012	12:05:57 PM	BCl3 valve closed
11/14/2012	12:05:57 PM	PH3 valve closed
11/14/2012	12:05:57 PM	SiCl4 pre valve closed
11/14/2012	12:05:57 PM	SiCl4 post valve closed
11/14/2012	12:05:57 PM	Bypass valve closed
11/14/2012	12:05:57 PM	Bubbler valve closed
11/14/2012	12:05:57 PM	Main Vac valve opened
11/14/2012	12:05:57 PM	Helium MFC set to  0.000000
11/14/2012	12:05:57 PM	H2 MFC set to  0.000000
11/14/2012	12:05:57 PM	BCl3 MFC set to  0.000000
11/14/2012	12:05:57 PM	PH3 MFC set to  0.000000
11/14/2012	12:05:57 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:05:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:05:57 PM	Tube furnace set to 0
11/14/2012	12:06:27 PM	H2 valve closed
11/14/2012	12:06:27 PM	BCl3 valve closed
11/14/2012	12:06:27 PM	PH3 valve closed
11/14/2012	12:06:27 PM	SiCl4 pre valve closed
11/14/2012	12:06:27 PM	SiCl4 post valve closed
11/14/2012	12:06:27 PM	Bypass valve closed
11/14/2012	12:06:27 PM	Bubbler valve closed
11/14/2012	12:06:27 PM	Helium valve opened
11/14/2012	12:06:27 PM	Main Vac valve opened
11/14/2012	12:06:27 PM	Helium MFC set to  20.000000
11/14/2012	12:06:27 PM	H2 MFC set to  0.000000
11/14/2012	12:06:27 PM	BCl3 MFC set to  0.000000
11/14/2012	12:06:27 PM	PH3 MFC set to  0.000000
11/14/2012	12:06:27 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:06:27 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:06:27 PM	Tube furnace set to 0
11/14/2012	12:06:57 PM	Helium valve closed
11/14/2012	12:06:57 PM	H2 valve closed
11/14/2012	12:06:57 PM	BCl3 valve closed
11/14/2012	12:06:57 PM	PH3 valve closed
11/14/2012	12:06:57 PM	SiCl4 pre valve closed
11/14/2012	12:06:57 PM	SiCl4 post valve closed
11/14/2012	12:06:57 PM	Bypass valve closed
11/14/2012	12:06:57 PM	Bubbler valve closed
11/14/2012	12:06:57 PM	Main Vac valve opened
11/14/2012	12:06:57 PM	Helium MFC set to  0.000000
11/14/2012	12:06:57 PM	H2 MFC set to  0.000000
11/14/2012	12:06:57 PM	BCl3 MFC set to  0.000000
11/14/2012	12:06:57 PM	PH3 MFC set to  0.000000
11/14/2012	12:06:57 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:06:57 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:06:58 PM	Tube furnace set to 0
11/14/2012	12:07:15 PM	Run aborted at 12:07 PM
11/14/2012	12:07:15 PM	Helium valve closed
11/14/2012	12:07:15 PM	H2 valve closed
11/14/2012	12:07:15 PM	BCl3 valve closed
11/14/2012	12:07:15 PM	PH3 valve closed
11/14/2012	12:07:15 PM	SiCl4 pre valve closed
11/14/2012	12:07:15 PM	SiCl4 post valve closed
11/14/2012	12:07:15 PM	Bypass valve closed
11/14/2012	12:07:15 PM	Main Vac valve closed
11/14/2012	12:07:15 PM	Bubbler valve closed
11/14/2012	12:07:15 PM	Helium MFC set to  0.000000
11/14/2012	12:07:15 PM	H2 MFC set to  0.000000
11/14/2012	12:07:15 PM	BCl3 MFC set to  0.000000
11/14/2012	12:07:15 PM	PH3 MFC set to  0.000000
11/14/2012	12:07:15 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:07:16 PM	Tube furnace set to 0
11/14/2012	12:07:17 PM	Main Vac valve opened
11/14/2012	12:07:44 PM	Main Vac valve closed
11/14/2012	12:07:55 PM	Main Vac valve opened
11/14/2012	12:23:39 PM	Main Vac valve closed
11/14/2012	12:23:49 PM	Main Vac valve opened
11/14/2012	12:24:11 PM	Recipe started at 12:24 PM
11/14/2012	12:24:11 PM	Helium valve closed
11/14/2012	12:24:11 PM	H2 valve closed
11/14/2012	12:24:11 PM	BCl3 valve closed
11/14/2012	12:24:11 PM	PH3 valve closed
11/14/2012	12:24:11 PM	SiCl4 post valve closed
11/14/2012	12:24:11 PM	Main Vac valve closed
11/14/2012	12:24:11 PM	Bypass valve closed
11/14/2012	12:24:11 PM	Bubbler valve closed
11/14/2012	12:24:11 PM	SiCl4 pre valve opened
11/14/2012	12:24:11 PM	Helium MFC set to  0.000000
11/14/2012	12:24:11 PM	H2 MFC set to  0.000000
11/14/2012	12:24:11 PM	BCl3 MFC set to  0.000000
11/14/2012	12:24:11 PM	PH3 MFC set to  0.000000
11/14/2012	12:24:11 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:24:11 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:24:12 PM	Tube furnace set to 0
11/14/2012	12:24:15 PM	Helium valve closed
11/14/2012	12:24:15 PM	BCl3 valve closed
11/14/2012	12:24:15 PM	PH3 valve closed
11/14/2012	12:24:15 PM	SiCl4 pre valve closed
11/14/2012	12:24:15 PM	SiCl4 post valve closed
11/14/2012	12:24:15 PM	Main Vac valve closed
11/14/2012	12:24:15 PM	Bypass valve closed
11/14/2012	12:24:15 PM	Bubbler valve closed
11/14/2012	12:24:15 PM	H2 valve opened
11/14/2012	12:24:15 PM	Helium MFC set to  0.000000
11/14/2012	12:24:15 PM	H2 MFC set to  500.000000
11/14/2012	12:24:15 PM	BCl3 MFC set to  0.000000
11/14/2012	12:24:15 PM	PH3 MFC set to  0.000000
11/14/2012	12:24:15 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:24:15 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:24:15 PM	Tube furnace set to 0
11/14/2012	12:25:27 PM	Helium valve closed
11/14/2012	12:25:27 PM	BCl3 valve closed
11/14/2012	12:25:27 PM	PH3 valve closed
11/14/2012	12:25:27 PM	SiCl4 pre valve closed
11/14/2012	12:25:27 PM	SiCl4 post valve closed
11/14/2012	12:25:27 PM	Main Vac valve closed
11/14/2012	12:25:27 PM	Bypass valve closed
11/14/2012	12:25:27 PM	H2 valve opened
11/14/2012	12:25:27 PM	Bubbler valve opened
11/14/2012	12:25:27 PM	Helium MFC set to  0.000000
11/14/2012	12:25:27 PM	H2 MFC set to  500.000000
11/14/2012	12:25:27 PM	BCl3 MFC set to  0.000000
11/14/2012	12:25:27 PM	PH3 MFC set to  0.000000
11/14/2012	12:25:27 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:25:27 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:25:28 PM	Tube furnace set to 0
11/14/2012	12:25:29 PM	Helium valve closed
11/14/2012	12:25:29 PM	BCl3 valve closed
11/14/2012	12:25:29 PM	PH3 valve closed
11/14/2012	12:25:29 PM	SiCl4 pre valve closed
11/14/2012	12:25:29 PM	SiCl4 post valve closed
11/14/2012	12:25:29 PM	Main Vac valve closed
11/14/2012	12:25:29 PM	Bypass valve closed
11/14/2012	12:25:29 PM	H2 valve opened
11/14/2012	12:25:29 PM	Bubbler valve opened
11/14/2012	12:25:29 PM	Helium MFC set to  0.000000
11/14/2012	12:25:29 PM	H2 MFC set to  500.000000
11/14/2012	12:25:29 PM	BCl3 MFC set to  0.000000
11/14/2012	12:25:29 PM	PH3 MFC set to  0.000000
11/14/2012	12:25:29 PM	SiCl4 MFC set to  0.000000
11/14/2012	12:25:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:25:29 PM	Tube furnace set to 1000
11/14/2012	12:45:29 PM	Helium valve closed
11/14/2012	12:45:29 PM	PH3 valve closed
11/14/2012	12:45:29 PM	Main Vac valve closed
11/14/2012	12:45:29 PM	Bypass valve closed
11/14/2012	12:45:29 PM	H2 valve opened
11/14/2012	12:45:29 PM	BCl3 valve opened
11/14/2012	12:45:29 PM	SiCl4 pre valve opened
11/14/2012	12:45:29 PM	SiCl4 post valve opened
11/14/2012	12:45:29 PM	Bubbler valve opened
11/14/2012	12:45:29 PM	Helium MFC set to  0.000000
11/14/2012	12:45:29 PM	H2 MFC set to  450.000000
11/14/2012	12:45:29 PM	BCl3 MFC set to  1.300000
11/14/2012	12:45:29 PM	PH3 MFC set to  0.000000
11/14/2012	12:45:29 PM	SiCl4 MFC set to  50.000000
11/14/2012	12:45:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:45:29 PM	Tube furnace set to 1000
11/14/2012	12:56:29 PM	Helium valve closed
11/14/2012	12:56:29 PM	BCl3 valve closed
11/14/2012	12:56:29 PM	Main Vac valve closed
11/14/2012	12:56:29 PM	Bypass valve closed
11/14/2012	12:56:29 PM	H2 valve opened
11/14/2012	12:56:29 PM	PH3 valve opened
11/14/2012	12:56:29 PM	SiCl4 pre valve opened
11/14/2012	12:56:29 PM	SiCl4 post valve opened
11/14/2012	12:56:29 PM	Bubbler valve opened
11/14/2012	12:56:29 PM	Helium MFC set to  0.000000
11/14/2012	12:56:29 PM	H2 MFC set to  450.000000
11/14/2012	12:56:29 PM	BCl3 MFC set to  0.000000
11/14/2012	12:56:29 PM	PH3 MFC set to  20.000000
11/14/2012	12:56:29 PM	SiCl4 MFC set to  50.000000
11/14/2012	12:56:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	12:56:29 PM	Tube furnace set to 1000
11/14/2012	1:01:29 PM	Helium valve closed
11/14/2012	1:01:29 PM	BCl3 valve closed
11/14/2012	1:01:29 PM	PH3 valve closed
11/14/2012	1:01:29 PM	SiCl4 pre valve closed
11/14/2012	1:01:29 PM	SiCl4 post valve closed
11/14/2012	1:01:29 PM	Main Vac valve closed
11/14/2012	1:01:29 PM	Bypass valve closed
11/14/2012	1:01:29 PM	H2 valve opened
11/14/2012	1:01:29 PM	Bubbler valve opened
11/14/2012	1:01:29 PM	Helium MFC set to  0.000000
11/14/2012	1:01:29 PM	H2 MFC set to  500.000000
11/14/2012	1:01:29 PM	BCl3 MFC set to  0.000000
11/14/2012	1:01:29 PM	PH3 MFC set to  0.000000
11/14/2012	1:01:29 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:01:29 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:01:29 PM	Tube furnace set to 950
11/14/2012	1:03:29 PM	Helium valve closed
11/14/2012	1:03:29 PM	BCl3 valve closed
11/14/2012	1:03:29 PM	PH3 valve closed
11/14/2012	1:03:29 PM	SiCl4 pre valve closed
11/14/2012	1:03:29 PM	SiCl4 post valve closed
11/14/2012	1:03:29 PM	Main Vac valve closed
11/14/2012	1:03:29 PM	Bypass valve closed
11/14/2012	1:03:29 PM	H2 valve opened
11/14/2012	1:03:29 PM	Bubbler valve opened
11/14/2012	1:03:29 PM	Helium MFC set to  0.000000
11/14/2012	1:03:29 PM	H2 MFC set to  500.000000
11/14/2012	1:03:29 PM	BCl3 MFC set to  0.000000
11/14/2012	1:03:30 PM	PH3 MFC set to  0.000000
11/14/2012	1:03:30 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:03:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:03:30 PM	Tube furnace set to 900
11/14/2012	1:05:30 PM	Helium valve closed
11/14/2012	1:05:30 PM	BCl3 valve closed
11/14/2012	1:05:30 PM	PH3 valve closed
11/14/2012	1:05:30 PM	SiCl4 pre valve closed
11/14/2012	1:05:30 PM	SiCl4 post valve closed
11/14/2012	1:05:30 PM	Main Vac valve closed
11/14/2012	1:05:30 PM	Bypass valve closed
11/14/2012	1:05:30 PM	H2 valve opened
11/14/2012	1:05:30 PM	Bubbler valve opened
11/14/2012	1:05:30 PM	Helium MFC set to  0.000000
11/14/2012	1:05:30 PM	H2 MFC set to  500.000000
11/14/2012	1:05:30 PM	BCl3 MFC set to  0.000000
11/14/2012	1:05:30 PM	PH3 MFC set to  0.000000
11/14/2012	1:05:30 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:05:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:05:30 PM	Tube furnace set to 850
11/14/2012	1:07:30 PM	H2 valve closed
11/14/2012	1:07:30 PM	BCl3 valve closed
11/14/2012	1:07:30 PM	PH3 valve closed
11/14/2012	1:07:30 PM	SiCl4 pre valve closed
11/14/2012	1:07:30 PM	SiCl4 post valve closed
11/14/2012	1:07:30 PM	Main Vac valve closed
11/14/2012	1:07:30 PM	Bypass valve closed
11/14/2012	1:07:30 PM	Helium valve opened
11/14/2012	1:07:30 PM	Bubbler valve opened
11/14/2012	1:07:30 PM	Helium MFC set to  500.000000
11/14/2012	1:07:30 PM	H2 MFC set to  0.000000
11/14/2012	1:07:30 PM	BCl3 MFC set to  0.000000
11/14/2012	1:07:30 PM	PH3 MFC set to  0.000000
11/14/2012	1:07:30 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:07:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:07:30 PM	Tube furnace set to 800
11/14/2012	1:09:30 PM	H2 valve closed
11/14/2012	1:09:30 PM	BCl3 valve closed
11/14/2012	1:09:30 PM	PH3 valve closed
11/14/2012	1:09:30 PM	SiCl4 pre valve closed
11/14/2012	1:09:30 PM	SiCl4 post valve closed
11/14/2012	1:09:30 PM	Main Vac valve closed
11/14/2012	1:09:30 PM	Bypass valve closed
11/14/2012	1:09:30 PM	Helium valve opened
11/14/2012	1:09:30 PM	Bubbler valve opened
11/14/2012	1:09:30 PM	Helium MFC set to  500.000000
11/14/2012	1:09:30 PM	H2 MFC set to  0.000000
11/14/2012	1:09:30 PM	BCl3 MFC set to  0.000000
11/14/2012	1:09:30 PM	PH3 MFC set to  0.000000
11/14/2012	1:09:30 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:09:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:09:30 PM	Tube furnace set to 750
11/14/2012	1:11:30 PM	H2 valve closed
11/14/2012	1:11:30 PM	BCl3 valve closed
11/14/2012	1:11:30 PM	PH3 valve closed
11/14/2012	1:11:30 PM	SiCl4 pre valve closed
11/14/2012	1:11:30 PM	SiCl4 post valve closed
11/14/2012	1:11:30 PM	Main Vac valve closed
11/14/2012	1:11:30 PM	Bypass valve closed
11/14/2012	1:11:30 PM	Helium valve opened
11/14/2012	1:11:30 PM	Bubbler valve opened
11/14/2012	1:11:30 PM	Helium MFC set to  500.000000
11/14/2012	1:11:30 PM	H2 MFC set to  0.000000
11/14/2012	1:11:30 PM	BCl3 MFC set to  0.000000
11/14/2012	1:11:30 PM	PH3 MFC set to  0.000000
11/14/2012	1:11:30 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:11:30 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:11:31 PM	Tube furnace set to 0
11/14/2012	1:31:31 PM	Helium valve closed
11/14/2012	1:31:31 PM	H2 valve closed
11/14/2012	1:31:31 PM	BCl3 valve closed
11/14/2012	1:31:31 PM	PH3 valve closed
11/14/2012	1:31:31 PM	SiCl4 pre valve closed
11/14/2012	1:31:31 PM	SiCl4 post valve closed
11/14/2012	1:31:31 PM	Main Vac valve closed
11/14/2012	1:31:31 PM	Bypass valve closed
11/14/2012	1:31:31 PM	Bubbler valve closed
11/14/2012	1:31:31 PM	Helium MFC set to  0.000000
11/14/2012	1:31:31 PM	H2 MFC set to  0.000000
11/14/2012	1:31:31 PM	BCl3 MFC set to  0.000000
11/14/2012	1:31:31 PM	PH3 MFC set to  0.000000
11/14/2012	1:31:31 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:31:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:31:31 PM	Tube furnace set to 0
11/14/2012	1:31:32 PM	Helium valve closed
11/14/2012	1:31:32 PM	H2 valve closed
11/14/2012	1:31:32 PM	BCl3 valve closed
11/14/2012	1:31:32 PM	PH3 valve closed
11/14/2012	1:31:32 PM	SiCl4 pre valve closed
11/14/2012	1:31:32 PM	SiCl4 post valve closed
11/14/2012	1:31:32 PM	Main Vac valve closed
11/14/2012	1:31:32 PM	Bubbler valve closed
11/14/2012	1:31:32 PM	Bypass valve opened
11/14/2012	1:31:32 PM	Helium MFC set to  0.000000
11/14/2012	1:31:32 PM	H2 MFC set to  0.000000
11/14/2012	1:31:32 PM	BCl3 MFC set to  0.000000
11/14/2012	1:31:32 PM	PH3 MFC set to  0.000000
11/14/2012	1:31:32 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:31:32 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:31:32 PM	Tube furnace set to 0
11/14/2012	1:32:24 PM	Helium valve closed
11/14/2012	1:32:24 PM	H2 valve closed
11/14/2012	1:32:24 PM	BCl3 valve closed
11/14/2012	1:32:24 PM	PH3 valve closed
11/14/2012	1:32:24 PM	SiCl4 pre valve closed
11/14/2012	1:32:24 PM	SiCl4 post valve closed
11/14/2012	1:32:24 PM	Main Vac valve closed
11/14/2012	1:32:24 PM	Bubbler valve closed
11/14/2012	1:32:24 PM	Bypass valve opened
11/14/2012	1:32:24 PM	Helium MFC set to  0.000000
11/14/2012	1:32:24 PM	H2 MFC set to  0.000000
11/14/2012	1:32:24 PM	BCl3 MFC set to  0.000000
11/14/2012	1:32:24 PM	PH3 MFC set to  0.000000
11/14/2012	1:32:24 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:32:24 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:32:25 PM	Tube furnace set to 0
11/14/2012	1:33:25 PM	Helium valve closed
11/14/2012	1:33:25 PM	H2 valve closed
11/14/2012	1:33:25 PM	BCl3 valve closed
11/14/2012	1:33:25 PM	PH3 valve closed
11/14/2012	1:33:25 PM	SiCl4 pre valve closed
11/14/2012	1:33:25 PM	SiCl4 post valve closed
11/14/2012	1:33:25 PM	Bypass valve closed
11/14/2012	1:33:25 PM	Bubbler valve closed
11/14/2012	1:33:25 PM	Main Vac valve opened
11/14/2012	1:33:25 PM	Helium MFC set to  0.000000
11/14/2012	1:33:25 PM	H2 MFC set to  0.000000
11/14/2012	1:33:25 PM	BCl3 MFC set to  0.000000
11/14/2012	1:33:25 PM	PH3 MFC set to  0.000000
11/14/2012	1:33:25 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:33:25 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:33:25 PM	Tube furnace set to 0
11/14/2012	1:33:26 PM	Run finished at 1:33 PM
11/14/2012	1:58:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	1:58:31 PM	Recipe started at 1:58 PM
11/14/2012	1:58:31 PM	Helium valve closed
11/14/2012	1:58:31 PM	H2 valve closed
11/14/2012	1:58:31 PM	BCl3 valve closed
11/14/2012	1:58:31 PM	PH3 valve closed
11/14/2012	1:58:31 PM	SiCl4 pre valve closed
11/14/2012	1:58:31 PM	SiCl4 post valve closed
11/14/2012	1:58:31 PM	Main Vac valve closed
11/14/2012	1:58:31 PM	Bypass valve closed
11/14/2012	1:58:31 PM	Bubbler valve closed
11/14/2012	1:58:31 PM	Helium MFC set to  0.000000
11/14/2012	1:58:31 PM	H2 MFC set to  0.000000
11/14/2012	1:58:31 PM	BCl3 MFC set to  0.000000
11/14/2012	1:58:31 PM	PH3 MFC set to  0.000000
11/14/2012	1:58:31 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:58:31 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:58:31 PM	Tube furnace set to 0
11/14/2012	1:58:34 PM	H2 valve closed
11/14/2012	1:58:34 PM	BCl3 valve closed
11/14/2012	1:58:34 PM	PH3 valve closed
11/14/2012	1:58:34 PM	SiCl4 pre valve closed
11/14/2012	1:58:34 PM	SiCl4 post valve closed
11/14/2012	1:58:34 PM	Main Vac valve closed
11/14/2012	1:58:34 PM	Bypass valve closed
11/14/2012	1:58:34 PM	Bubbler valve closed
11/14/2012	1:58:34 PM	Helium valve opened
11/14/2012	1:58:34 PM	Helium MFC set to  500.000000
11/14/2012	1:58:34 PM	H2 MFC set to  0.000000
11/14/2012	1:58:34 PM	BCl3 MFC set to  0.000000
11/14/2012	1:58:34 PM	PH3 MFC set to  0.000000
11/14/2012	1:58:34 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:58:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:58:34 PM	Tube furnace set to 0
11/14/2012	1:59:42 PM	Helium valve closed
11/14/2012	1:59:42 PM	H2 valve closed
11/14/2012	1:59:42 PM	BCl3 valve closed
11/14/2012	1:59:42 PM	PH3 valve closed
11/14/2012	1:59:42 PM	SiCl4 pre valve closed
11/14/2012	1:59:42 PM	SiCl4 post valve closed
11/14/2012	1:59:42 PM	Main Vac valve closed
11/14/2012	1:59:42 PM	Bypass valve closed
11/14/2012	1:59:42 PM	Bubbler valve closed
11/14/2012	1:59:42 PM	Helium MFC set to  0.000000
11/14/2012	1:59:42 PM	H2 MFC set to  0.000000
11/14/2012	1:59:42 PM	BCl3 MFC set to  0.000000
11/14/2012	1:59:42 PM	PH3 MFC set to  0.000000
11/14/2012	1:59:42 PM	SiCl4 MFC set to  0.000000
11/14/2012	1:59:42 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	1:59:42 PM	Tube furnace set to 0
11/14/2012	1:59:43 PM	Run finished at 1:59 PM
11/14/2012	1:59:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	2:06:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	2:06:36 PM	Recipe started at 2:06 PM
11/14/2012	2:06:36 PM	Helium valve closed
11/14/2012	2:06:36 PM	H2 valve closed
11/14/2012	2:06:36 PM	BCl3 valve closed
11/14/2012	2:06:36 PM	PH3 valve closed
11/14/2012	2:06:36 PM	SiCl4 pre valve closed
11/14/2012	2:06:36 PM	SiCl4 post valve closed
11/14/2012	2:06:36 PM	Main Vac valve closed
11/14/2012	2:06:36 PM	Bubbler valve closed
11/14/2012	2:06:36 PM	Bypass valve opened
11/14/2012	2:06:36 PM	Helium MFC set to  0.000000
11/14/2012	2:06:36 PM	H2 MFC set to  0.000000
11/14/2012	2:06:36 PM	BCl3 MFC set to  0.000000
11/14/2012	2:06:36 PM	PH3 MFC set to  0.000000
11/14/2012	2:06:36 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:06:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:06:36 PM	Tube furnace set to 0
11/14/2012	2:07:49 PM	Helium valve closed
11/14/2012	2:07:49 PM	H2 valve closed
11/14/2012	2:07:49 PM	BCl3 valve closed
11/14/2012	2:07:49 PM	PH3 valve closed
11/14/2012	2:07:49 PM	SiCl4 pre valve closed
11/14/2012	2:07:49 PM	SiCl4 post valve closed
11/14/2012	2:07:49 PM	Main Vac valve closed
11/14/2012	2:07:49 PM	Bubbler valve closed
11/14/2012	2:07:49 PM	Bypass valve opened
11/14/2012	2:07:49 PM	Helium MFC set to  0.000000
11/14/2012	2:07:49 PM	H2 MFC set to  0.000000
11/14/2012	2:07:49 PM	BCl3 MFC set to  0.000000
11/14/2012	2:07:49 PM	PH3 MFC set to  0.000000
11/14/2012	2:07:49 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:07:49 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:07:50 PM	Tube furnace set to 0
11/14/2012	2:08:50 PM	Helium valve closed
11/14/2012	2:08:50 PM	H2 valve closed
11/14/2012	2:08:50 PM	BCl3 valve closed
11/14/2012	2:08:50 PM	PH3 valve closed
11/14/2012	2:08:50 PM	SiCl4 pre valve closed
11/14/2012	2:08:50 PM	SiCl4 post valve closed
11/14/2012	2:08:50 PM	Bypass valve closed
11/14/2012	2:08:50 PM	Bubbler valve closed
11/14/2012	2:08:50 PM	Main Vac valve opened
11/14/2012	2:08:50 PM	Helium MFC set to  0.000000
11/14/2012	2:08:50 PM	H2 MFC set to  0.000000
11/14/2012	2:08:50 PM	BCl3 MFC set to  0.000000
11/14/2012	2:08:50 PM	PH3 MFC set to  0.000000
11/14/2012	2:08:50 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:08:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:08:50 PM	Tube furnace set to 0
11/14/2012	2:08:51 PM	Run finished at 2:08 PM
11/14/2012	2:08:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	2:29:19 PM	Tube furnace set to 0
11/14/2012	2:29:22 PM	Tube furnace set to 200
11/14/2012	2:30:33 PM	Recipe started at 2:30 PM
11/14/2012	2:30:33 PM	Helium valve closed
11/14/2012	2:30:33 PM	H2 valve closed
11/14/2012	2:30:33 PM	BCl3 valve closed
11/14/2012	2:30:33 PM	PH3 valve closed
11/14/2012	2:30:33 PM	SiCl4 pre valve closed
11/14/2012	2:30:33 PM	SiCl4 post valve closed
11/14/2012	2:30:33 PM	Bypass valve closed
11/14/2012	2:30:33 PM	Bubbler valve closed
11/14/2012	2:30:33 PM	Main Vac valve opened
11/14/2012	2:30:33 PM	Helium MFC set to  0.000000
11/14/2012	2:30:33 PM	H2 MFC set to  0.000000
11/14/2012	2:30:33 PM	BCl3 MFC set to  0.000000
11/14/2012	2:30:33 PM	PH3 MFC set to  0.000000
11/14/2012	2:30:33 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:30:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:30:34 PM	Tube furnace set to 0
11/14/2012	2:31:04 PM	H2 valve closed
11/14/2012	2:31:04 PM	BCl3 valve closed
11/14/2012	2:31:04 PM	PH3 valve closed
11/14/2012	2:31:04 PM	SiCl4 pre valve closed
11/14/2012	2:31:04 PM	SiCl4 post valve closed
11/14/2012	2:31:04 PM	Bypass valve closed
11/14/2012	2:31:04 PM	Bubbler valve closed
11/14/2012	2:31:04 PM	Helium valve opened
11/14/2012	2:31:04 PM	Main Vac valve opened
11/14/2012	2:31:04 PM	Helium MFC set to  20.000000
11/14/2012	2:31:04 PM	H2 MFC set to  0.000000
11/14/2012	2:31:04 PM	BCl3 MFC set to  0.000000
11/14/2012	2:31:04 PM	PH3 MFC set to  0.000000
11/14/2012	2:31:04 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:31:04 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:31:04 PM	Tube furnace set to 0
11/14/2012	2:31:34 PM	Helium valve closed
11/14/2012	2:31:34 PM	H2 valve closed
11/14/2012	2:31:34 PM	BCl3 valve closed
11/14/2012	2:31:34 PM	PH3 valve closed
11/14/2012	2:31:34 PM	SiCl4 pre valve closed
11/14/2012	2:31:34 PM	SiCl4 post valve closed
11/14/2012	2:31:34 PM	Bypass valve closed
11/14/2012	2:31:34 PM	Bubbler valve closed
11/14/2012	2:31:34 PM	Main Vac valve opened
11/14/2012	2:31:34 PM	Helium MFC set to  0.000000
11/14/2012	2:31:34 PM	H2 MFC set to  0.000000
11/14/2012	2:31:34 PM	BCl3 MFC set to  0.000000
11/14/2012	2:31:34 PM	PH3 MFC set to  0.000000
11/14/2012	2:31:34 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:31:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:31:34 PM	Tube furnace set to 0
11/14/2012	2:32:04 PM	H2 valve closed
11/14/2012	2:32:04 PM	BCl3 valve closed
11/14/2012	2:32:04 PM	PH3 valve closed
11/14/2012	2:32:04 PM	SiCl4 pre valve closed
11/14/2012	2:32:04 PM	SiCl4 post valve closed
11/14/2012	2:32:04 PM	Bypass valve closed
11/14/2012	2:32:04 PM	Bubbler valve closed
11/14/2012	2:32:04 PM	Helium valve opened
11/14/2012	2:32:04 PM	Main Vac valve opened
11/14/2012	2:32:04 PM	Helium MFC set to  20.000000
11/14/2012	2:32:04 PM	H2 MFC set to  0.000000
11/14/2012	2:32:04 PM	BCl3 MFC set to  0.000000
11/14/2012	2:32:04 PM	PH3 MFC set to  0.000000
11/14/2012	2:32:04 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:32:04 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:32:04 PM	Tube furnace set to 0
11/14/2012	2:32:34 PM	Helium valve closed
11/14/2012	2:32:34 PM	H2 valve closed
11/14/2012	2:32:34 PM	BCl3 valve closed
11/14/2012	2:32:34 PM	PH3 valve closed
11/14/2012	2:32:34 PM	SiCl4 pre valve closed
11/14/2012	2:32:34 PM	SiCl4 post valve closed
11/14/2012	2:32:34 PM	Bypass valve closed
11/14/2012	2:32:34 PM	Bubbler valve closed
11/14/2012	2:32:34 PM	Main Vac valve opened
11/14/2012	2:32:34 PM	Helium MFC set to  0.000000
11/14/2012	2:32:34 PM	H2 MFC set to  0.000000
11/14/2012	2:32:34 PM	BCl3 MFC set to  0.000000
11/14/2012	2:32:34 PM	PH3 MFC set to  0.000000
11/14/2012	2:32:34 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:32:34 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:32:34 PM	Tube furnace set to 0
11/14/2012	2:33:05 PM	H2 valve closed
11/14/2012	2:33:05 PM	BCl3 valve closed
11/14/2012	2:33:05 PM	PH3 valve closed
11/14/2012	2:33:05 PM	SiCl4 pre valve closed
11/14/2012	2:33:05 PM	SiCl4 post valve closed
11/14/2012	2:33:05 PM	Bypass valve closed
11/14/2012	2:33:05 PM	Bubbler valve closed
11/14/2012	2:33:05 PM	Helium valve opened
11/14/2012	2:33:05 PM	Main Vac valve opened
11/14/2012	2:33:05 PM	Helium MFC set to  20.000000
11/14/2012	2:33:05 PM	H2 MFC set to  0.000000
11/14/2012	2:33:05 PM	BCl3 MFC set to  0.000000
11/14/2012	2:33:05 PM	PH3 MFC set to  0.000000
11/14/2012	2:33:05 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:33:05 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:33:05 PM	Tube furnace set to 0
11/14/2012	2:33:35 PM	Helium valve closed
11/14/2012	2:33:35 PM	H2 valve closed
11/14/2012	2:33:35 PM	BCl3 valve closed
11/14/2012	2:33:35 PM	PH3 valve closed
11/14/2012	2:33:35 PM	SiCl4 pre valve closed
11/14/2012	2:33:35 PM	SiCl4 post valve closed
11/14/2012	2:33:35 PM	Bypass valve closed
11/14/2012	2:33:35 PM	Bubbler valve closed
11/14/2012	2:33:35 PM	Main Vac valve opened
11/14/2012	2:33:35 PM	Helium MFC set to  0.000000
11/14/2012	2:33:35 PM	H2 MFC set to  0.000000
11/14/2012	2:33:35 PM	BCl3 MFC set to  0.000000
11/14/2012	2:33:35 PM	PH3 MFC set to  0.000000
11/14/2012	2:33:35 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:33:35 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:33:35 PM	Tube furnace set to 0
11/14/2012	2:34:05 PM	H2 valve closed
11/14/2012	2:34:05 PM	BCl3 valve closed
11/14/2012	2:34:05 PM	PH3 valve closed
11/14/2012	2:34:05 PM	SiCl4 pre valve closed
11/14/2012	2:34:05 PM	SiCl4 post valve closed
11/14/2012	2:34:05 PM	Bypass valve closed
11/14/2012	2:34:05 PM	Bubbler valve closed
11/14/2012	2:34:05 PM	Helium valve opened
11/14/2012	2:34:05 PM	Main Vac valve opened
11/14/2012	2:34:05 PM	Helium MFC set to  20.000000
11/14/2012	2:34:05 PM	H2 MFC set to  0.000000
11/14/2012	2:34:05 PM	BCl3 MFC set to  0.000000
11/14/2012	2:34:05 PM	PH3 MFC set to  0.000000
11/14/2012	2:34:05 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:34:05 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:34:05 PM	Tube furnace set to 0
11/14/2012	2:34:35 PM	Helium valve closed
11/14/2012	2:34:35 PM	H2 valve closed
11/14/2012	2:34:35 PM	BCl3 valve closed
11/14/2012	2:34:35 PM	PH3 valve closed
11/14/2012	2:34:35 PM	SiCl4 pre valve closed
11/14/2012	2:34:35 PM	SiCl4 post valve closed
11/14/2012	2:34:35 PM	Bypass valve closed
11/14/2012	2:34:35 PM	Bubbler valve closed
11/14/2012	2:34:35 PM	Main Vac valve opened
11/14/2012	2:34:35 PM	Helium MFC set to  0.000000
11/14/2012	2:34:35 PM	H2 MFC set to  0.000000
11/14/2012	2:34:35 PM	BCl3 MFC set to  0.000000
11/14/2012	2:34:35 PM	PH3 MFC set to  0.000000
11/14/2012	2:34:35 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:34:35 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:34:35 PM	Tube furnace set to 0
11/14/2012	2:35:05 PM	H2 valve closed
11/14/2012	2:35:05 PM	BCl3 valve closed
11/14/2012	2:35:06 PM	PH3 valve closed
11/14/2012	2:35:06 PM	SiCl4 pre valve closed
11/14/2012	2:35:06 PM	SiCl4 post valve closed
11/14/2012	2:35:06 PM	Bypass valve closed
11/14/2012	2:35:06 PM	Bubbler valve closed
11/14/2012	2:35:06 PM	Helium valve opened
11/14/2012	2:35:06 PM	Main Vac valve opened
11/14/2012	2:35:06 PM	Helium MFC set to  20.000000
11/14/2012	2:35:06 PM	H2 MFC set to  0.000000
11/14/2012	2:35:06 PM	BCl3 MFC set to  0.000000
11/14/2012	2:35:06 PM	PH3 MFC set to  0.000000
11/14/2012	2:35:06 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:35:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:35:06 PM	Tube furnace set to 0
11/14/2012	2:35:36 PM	Helium valve closed
11/14/2012	2:35:36 PM	H2 valve closed
11/14/2012	2:35:36 PM	BCl3 valve closed
11/14/2012	2:35:36 PM	PH3 valve closed
11/14/2012	2:35:36 PM	SiCl4 pre valve closed
11/14/2012	2:35:36 PM	SiCl4 post valve closed
11/14/2012	2:35:36 PM	Bypass valve closed
11/14/2012	2:35:36 PM	Bubbler valve closed
11/14/2012	2:35:36 PM	Main Vac valve opened
11/14/2012	2:35:36 PM	Helium MFC set to  0.000000
11/14/2012	2:35:36 PM	H2 MFC set to  0.000000
11/14/2012	2:35:36 PM	BCl3 MFC set to  0.000000
11/14/2012	2:35:36 PM	PH3 MFC set to  0.000000
11/14/2012	2:35:36 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:35:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:35:36 PM	Tube furnace set to 0
11/14/2012	2:36:06 PM	H2 valve closed
11/14/2012	2:36:06 PM	BCl3 valve closed
11/14/2012	2:36:06 PM	PH3 valve closed
11/14/2012	2:36:06 PM	SiCl4 pre valve closed
11/14/2012	2:36:06 PM	SiCl4 post valve closed
11/14/2012	2:36:06 PM	Bypass valve closed
11/14/2012	2:36:06 PM	Bubbler valve closed
11/14/2012	2:36:06 PM	Helium valve opened
11/14/2012	2:36:06 PM	Main Vac valve opened
11/14/2012	2:36:06 PM	Helium MFC set to  20.000000
11/14/2012	2:36:06 PM	H2 MFC set to  0.000000
11/14/2012	2:36:06 PM	BCl3 MFC set to  0.000000
11/14/2012	2:36:06 PM	PH3 MFC set to  0.000000
11/14/2012	2:36:06 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:36:06 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:36:06 PM	Tube furnace set to 0
11/14/2012	2:36:36 PM	Helium valve closed
11/14/2012	2:36:36 PM	H2 valve closed
11/14/2012	2:36:36 PM	BCl3 valve closed
11/14/2012	2:36:36 PM	PH3 valve closed
11/14/2012	2:36:36 PM	SiCl4 pre valve closed
11/14/2012	2:36:36 PM	SiCl4 post valve closed
11/14/2012	2:36:36 PM	Bypass valve closed
11/14/2012	2:36:36 PM	Bubbler valve closed
11/14/2012	2:36:36 PM	Main Vac valve opened
11/14/2012	2:36:36 PM	Helium MFC set to  0.000000
11/14/2012	2:36:36 PM	H2 MFC set to  0.000000
11/14/2012	2:36:36 PM	BCl3 MFC set to  0.000000
11/14/2012	2:36:36 PM	PH3 MFC set to  0.000000
11/14/2012	2:36:36 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:36:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:36:36 PM	Tube furnace set to 0
11/14/2012	2:37:06 PM	H2 valve closed
11/14/2012	2:37:06 PM	BCl3 valve closed
11/14/2012	2:37:06 PM	PH3 valve closed
11/14/2012	2:37:06 PM	SiCl4 pre valve closed
11/14/2012	2:37:06 PM	SiCl4 post valve closed
11/14/2012	2:37:06 PM	Bypass valve closed
11/14/2012	2:37:06 PM	Bubbler valve closed
11/14/2012	2:37:07 PM	Helium valve opened
11/14/2012	2:37:07 PM	Main Vac valve opened
11/14/2012	2:37:07 PM	Helium MFC set to  20.000000
11/14/2012	2:37:07 PM	H2 MFC set to  0.000000
11/14/2012	2:37:07 PM	BCl3 MFC set to  0.000000
11/14/2012	2:37:07 PM	PH3 MFC set to  0.000000
11/14/2012	2:37:07 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:37:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:37:07 PM	Tube furnace set to 0
11/14/2012	2:37:37 PM	Helium valve closed
11/14/2012	2:37:37 PM	H2 valve closed
11/14/2012	2:37:37 PM	BCl3 valve closed
11/14/2012	2:37:37 PM	PH3 valve closed
11/14/2012	2:37:37 PM	SiCl4 pre valve closed
11/14/2012	2:37:37 PM	SiCl4 post valve closed
11/14/2012	2:37:37 PM	Bypass valve closed
11/14/2012	2:37:37 PM	Bubbler valve closed
11/14/2012	2:37:37 PM	Main Vac valve opened
11/14/2012	2:37:37 PM	Helium MFC set to  0.000000
11/14/2012	2:37:37 PM	H2 MFC set to  0.000000
11/14/2012	2:37:37 PM	BCl3 MFC set to  0.000000
11/14/2012	2:37:37 PM	PH3 MFC set to  0.000000
11/14/2012	2:37:37 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:37:37 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:37:37 PM	Tube furnace set to 0
11/14/2012	2:38:07 PM	H2 valve closed
11/14/2012	2:38:07 PM	BCl3 valve closed
11/14/2012	2:38:07 PM	PH3 valve closed
11/14/2012	2:38:07 PM	SiCl4 pre valve closed
11/14/2012	2:38:07 PM	SiCl4 post valve closed
11/14/2012	2:38:07 PM	Bypass valve closed
11/14/2012	2:38:07 PM	Bubbler valve closed
11/14/2012	2:38:07 PM	Helium valve opened
11/14/2012	2:38:07 PM	Main Vac valve opened
11/14/2012	2:38:07 PM	Helium MFC set to  20.000000
11/14/2012	2:38:07 PM	H2 MFC set to  0.000000
11/14/2012	2:38:07 PM	BCl3 MFC set to  0.000000
11/14/2012	2:38:07 PM	PH3 MFC set to  0.000000
11/14/2012	2:38:07 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:38:07 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:38:07 PM	Tube furnace set to 0
11/14/2012	2:38:37 PM	Helium valve closed
11/14/2012	2:38:37 PM	H2 valve closed
11/14/2012	2:38:37 PM	BCl3 valve closed
11/14/2012	2:38:37 PM	PH3 valve closed
11/14/2012	2:38:37 PM	SiCl4 pre valve closed
11/14/2012	2:38:37 PM	SiCl4 post valve closed
11/14/2012	2:38:37 PM	Bypass valve closed
11/14/2012	2:38:37 PM	Bubbler valve closed
11/14/2012	2:38:37 PM	Main Vac valve opened
11/14/2012	2:38:37 PM	Helium MFC set to  0.000000
11/14/2012	2:38:37 PM	H2 MFC set to  0.000000
11/14/2012	2:38:37 PM	BCl3 MFC set to  0.000000
11/14/2012	2:38:37 PM	PH3 MFC set to  0.000000
11/14/2012	2:38:37 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:38:37 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:38:37 PM	Tube furnace set to 0
11/14/2012	2:39:07 PM	H2 valve closed
11/14/2012	2:39:07 PM	BCl3 valve closed
11/14/2012	2:39:07 PM	PH3 valve closed
11/14/2012	2:39:07 PM	SiCl4 pre valve closed
11/14/2012	2:39:07 PM	SiCl4 post valve closed
11/14/2012	2:39:07 PM	Bypass valve closed
11/14/2012	2:39:07 PM	Bubbler valve closed
11/14/2012	2:39:07 PM	Helium valve opened
11/14/2012	2:39:07 PM	Main Vac valve opened
11/14/2012	2:39:07 PM	Helium MFC set to  20.000000
11/14/2012	2:39:07 PM	H2 MFC set to  0.000000
11/14/2012	2:39:07 PM	BCl3 MFC set to  0.000000
11/14/2012	2:39:08 PM	PH3 MFC set to  0.000000
11/14/2012	2:39:08 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:39:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:39:08 PM	Tube furnace set to 0
11/14/2012	2:39:38 PM	Helium valve closed
11/14/2012	2:39:38 PM	H2 valve closed
11/14/2012	2:39:38 PM	BCl3 valve closed
11/14/2012	2:39:38 PM	PH3 valve closed
11/14/2012	2:39:38 PM	SiCl4 pre valve closed
11/14/2012	2:39:38 PM	SiCl4 post valve closed
11/14/2012	2:39:38 PM	Bypass valve closed
11/14/2012	2:39:38 PM	Bubbler valve closed
11/14/2012	2:39:38 PM	Main Vac valve opened
11/14/2012	2:39:38 PM	Helium MFC set to  0.000000
11/14/2012	2:39:38 PM	H2 MFC set to  0.000000
11/14/2012	2:39:38 PM	BCl3 MFC set to  0.000000
11/14/2012	2:39:38 PM	PH3 MFC set to  0.000000
11/14/2012	2:39:38 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:39:38 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:39:38 PM	Tube furnace set to 200
11/14/2012	2:40:08 PM	H2 valve closed
11/14/2012	2:40:08 PM	BCl3 valve closed
11/14/2012	2:40:08 PM	PH3 valve closed
11/14/2012	2:40:08 PM	SiCl4 pre valve closed
11/14/2012	2:40:08 PM	SiCl4 post valve closed
11/14/2012	2:40:08 PM	Bypass valve closed
11/14/2012	2:40:08 PM	Bubbler valve closed
11/14/2012	2:40:08 PM	Helium valve opened
11/14/2012	2:40:08 PM	Main Vac valve opened
11/14/2012	2:40:08 PM	Helium MFC set to  20.000000
11/14/2012	2:40:08 PM	H2 MFC set to  0.000000
11/14/2012	2:40:08 PM	BCl3 MFC set to  0.000000
11/14/2012	2:40:08 PM	PH3 MFC set to  0.000000
11/14/2012	2:40:08 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:40:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:40:08 PM	Tube furnace set to 200
11/14/2012	2:40:38 PM	Helium valve closed
11/14/2012	2:40:38 PM	H2 valve closed
11/14/2012	2:40:38 PM	BCl3 valve closed
11/14/2012	2:40:38 PM	PH3 valve closed
11/14/2012	2:40:38 PM	SiCl4 pre valve closed
11/14/2012	2:40:38 PM	SiCl4 post valve closed
11/14/2012	2:40:38 PM	Bypass valve closed
11/14/2012	2:40:38 PM	Bubbler valve closed
11/14/2012	2:40:38 PM	Main Vac valve opened
11/14/2012	2:40:38 PM	Helium MFC set to  0.000000
11/14/2012	2:40:38 PM	H2 MFC set to  0.000000
11/14/2012	2:40:38 PM	BCl3 MFC set to  0.000000
11/14/2012	2:40:38 PM	PH3 MFC set to  0.000000
11/14/2012	2:40:38 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:40:38 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:40:38 PM	Tube furnace set to 200
11/14/2012	2:41:08 PM	H2 valve closed
11/14/2012	2:41:08 PM	BCl3 valve closed
11/14/2012	2:41:08 PM	PH3 valve closed
11/14/2012	2:41:08 PM	SiCl4 pre valve closed
11/14/2012	2:41:08 PM	SiCl4 post valve closed
11/14/2012	2:41:08 PM	Bypass valve closed
11/14/2012	2:41:08 PM	Bubbler valve closed
11/14/2012	2:41:08 PM	Helium valve opened
11/14/2012	2:41:08 PM	Main Vac valve opened
11/14/2012	2:41:08 PM	Helium MFC set to  20.000000
11/14/2012	2:41:08 PM	H2 MFC set to  0.000000
11/14/2012	2:41:08 PM	BCl3 MFC set to  0.000000
11/14/2012	2:41:08 PM	PH3 MFC set to  0.000000
11/14/2012	2:41:08 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:41:08 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:41:09 PM	Tube furnace set to 200
11/14/2012	2:41:39 PM	Helium valve closed
11/14/2012	2:41:39 PM	H2 valve closed
11/14/2012	2:41:39 PM	BCl3 valve closed
11/14/2012	2:41:39 PM	PH3 valve closed
11/14/2012	2:41:39 PM	SiCl4 pre valve closed
11/14/2012	2:41:39 PM	SiCl4 post valve closed
11/14/2012	2:41:39 PM	Bypass valve closed
11/14/2012	2:41:39 PM	Bubbler valve closed
11/14/2012	2:41:39 PM	Main Vac valve opened
11/14/2012	2:41:39 PM	Helium MFC set to  0.000000
11/14/2012	2:41:39 PM	H2 MFC set to  0.000000
11/14/2012	2:41:39 PM	BCl3 MFC set to  0.000000
11/14/2012	2:41:39 PM	PH3 MFC set to  0.000000
11/14/2012	2:41:39 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:41:39 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:41:39 PM	Tube furnace set to 200
11/14/2012	2:42:09 PM	H2 valve closed
11/14/2012	2:42:09 PM	BCl3 valve closed
11/14/2012	2:42:09 PM	PH3 valve closed
11/14/2012	2:42:09 PM	SiCl4 pre valve closed
11/14/2012	2:42:09 PM	SiCl4 post valve closed
11/14/2012	2:42:09 PM	Bypass valve closed
11/14/2012	2:42:09 PM	Bubbler valve closed
11/14/2012	2:42:09 PM	Helium valve opened
11/14/2012	2:42:09 PM	Main Vac valve opened
11/14/2012	2:42:09 PM	Helium MFC set to  20.000000
11/14/2012	2:42:09 PM	H2 MFC set to  0.000000
11/14/2012	2:42:09 PM	BCl3 MFC set to  0.000000
11/14/2012	2:42:09 PM	PH3 MFC set to  0.000000
11/14/2012	2:42:09 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:42:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:42:09 PM	Tube furnace set to 200
11/14/2012	2:42:39 PM	Helium valve closed
11/14/2012	2:42:39 PM	H2 valve closed
11/14/2012	2:42:39 PM	BCl3 valve closed
11/14/2012	2:42:39 PM	PH3 valve closed
11/14/2012	2:42:39 PM	SiCl4 pre valve closed
11/14/2012	2:42:39 PM	SiCl4 post valve closed
11/14/2012	2:42:39 PM	Bypass valve closed
11/14/2012	2:42:39 PM	Bubbler valve closed
11/14/2012	2:42:39 PM	Main Vac valve opened
11/14/2012	2:42:39 PM	Helium MFC set to  0.000000
11/14/2012	2:42:39 PM	H2 MFC set to  0.000000
11/14/2012	2:42:39 PM	BCl3 MFC set to  0.000000
11/14/2012	2:42:39 PM	PH3 MFC set to  0.000000
11/14/2012	2:42:39 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:42:39 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:42:39 PM	Tube furnace set to 200
11/14/2012	2:43:09 PM	H2 valve closed
11/14/2012	2:43:09 PM	BCl3 valve closed
11/14/2012	2:43:09 PM	PH3 valve closed
11/14/2012	2:43:09 PM	SiCl4 pre valve closed
11/14/2012	2:43:09 PM	SiCl4 post valve closed
11/14/2012	2:43:09 PM	Bypass valve closed
11/14/2012	2:43:09 PM	Bubbler valve closed
11/14/2012	2:43:09 PM	Helium valve opened
11/14/2012	2:43:09 PM	Main Vac valve opened
11/14/2012	2:43:09 PM	Helium MFC set to  20.000000
11/14/2012	2:43:09 PM	H2 MFC set to  0.000000
11/14/2012	2:43:09 PM	BCl3 MFC set to  0.000000
11/14/2012	2:43:09 PM	PH3 MFC set to  0.000000
11/14/2012	2:43:09 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:43:09 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:43:10 PM	Tube furnace set to 200
11/14/2012	2:43:40 PM	Helium valve closed
11/14/2012	2:43:40 PM	H2 valve closed
11/14/2012	2:43:40 PM	BCl3 valve closed
11/14/2012	2:43:40 PM	PH3 valve closed
11/14/2012	2:43:40 PM	SiCl4 pre valve closed
11/14/2012	2:43:40 PM	SiCl4 post valve closed
11/14/2012	2:43:40 PM	Bypass valve closed
11/14/2012	2:43:40 PM	Bubbler valve closed
11/14/2012	2:43:40 PM	Main Vac valve opened
11/14/2012	2:43:40 PM	Helium MFC set to  0.000000
11/14/2012	2:43:40 PM	H2 MFC set to  0.000000
11/14/2012	2:43:40 PM	BCl3 MFC set to  0.000000
11/14/2012	2:43:40 PM	PH3 MFC set to  0.000000
11/14/2012	2:43:40 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:43:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:43:40 PM	Tube furnace set to 200
11/14/2012	2:44:10 PM	H2 valve closed
11/14/2012	2:44:10 PM	BCl3 valve closed
11/14/2012	2:44:10 PM	PH3 valve closed
11/14/2012	2:44:10 PM	SiCl4 pre valve closed
11/14/2012	2:44:10 PM	SiCl4 post valve closed
11/14/2012	2:44:10 PM	Bypass valve closed
11/14/2012	2:44:10 PM	Bubbler valve closed
11/14/2012	2:44:10 PM	Helium valve opened
11/14/2012	2:44:10 PM	Main Vac valve opened
11/14/2012	2:44:10 PM	Helium MFC set to  20.000000
11/14/2012	2:44:10 PM	H2 MFC set to  0.000000
11/14/2012	2:44:10 PM	BCl3 MFC set to  0.000000
11/14/2012	2:44:10 PM	PH3 MFC set to  0.000000
11/14/2012	2:44:10 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:44:10 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:44:10 PM	Tube furnace set to 200
11/14/2012	2:44:40 PM	Helium valve closed
11/14/2012	2:44:40 PM	H2 valve closed
11/14/2012	2:44:40 PM	BCl3 valve closed
11/14/2012	2:44:40 PM	PH3 valve closed
11/14/2012	2:44:40 PM	SiCl4 pre valve closed
11/14/2012	2:44:40 PM	SiCl4 post valve closed
11/14/2012	2:44:40 PM	Bypass valve closed
11/14/2012	2:44:40 PM	Bubbler valve closed
11/14/2012	2:44:40 PM	Main Vac valve opened
11/14/2012	2:44:40 PM	Helium MFC set to  0.000000
11/14/2012	2:44:40 PM	H2 MFC set to  0.000000
11/14/2012	2:44:40 PM	BCl3 MFC set to  0.000000
11/14/2012	2:44:40 PM	PH3 MFC set to  0.000000
11/14/2012	2:44:40 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:44:40 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:44:40 PM	Tube furnace set to 200
11/14/2012	2:45:10 PM	H2 valve closed
11/14/2012	2:45:10 PM	BCl3 valve closed
11/14/2012	2:45:10 PM	PH3 valve closed
11/14/2012	2:45:10 PM	SiCl4 pre valve closed
11/14/2012	2:45:10 PM	SiCl4 post valve closed
11/14/2012	2:45:10 PM	Bypass valve closed
11/14/2012	2:45:10 PM	Bubbler valve closed
11/14/2012	2:45:10 PM	Helium valve opened
11/14/2012	2:45:10 PM	Main Vac valve opened
11/14/2012	2:45:10 PM	Helium MFC set to  20.000000
11/14/2012	2:45:10 PM	H2 MFC set to  0.000000
11/14/2012	2:45:10 PM	BCl3 MFC set to  0.000000
11/14/2012	2:45:10 PM	PH3 MFC set to  0.000000
11/14/2012	2:45:10 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:45:10 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:45:11 PM	Tube furnace set to 200
11/14/2012	2:45:41 PM	Helium valve closed
11/14/2012	2:45:41 PM	H2 valve closed
11/14/2012	2:45:41 PM	BCl3 valve closed
11/14/2012	2:45:41 PM	PH3 valve closed
11/14/2012	2:45:41 PM	SiCl4 pre valve closed
11/14/2012	2:45:41 PM	SiCl4 post valve closed
11/14/2012	2:45:41 PM	Bypass valve closed
11/14/2012	2:45:41 PM	Bubbler valve closed
11/14/2012	2:45:41 PM	Main Vac valve opened
11/14/2012	2:45:41 PM	Helium MFC set to  0.000000
11/14/2012	2:45:41 PM	H2 MFC set to  0.000000
11/14/2012	2:45:41 PM	BCl3 MFC set to  0.000000
11/14/2012	2:45:41 PM	PH3 MFC set to  0.000000
11/14/2012	2:45:41 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:45:41 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:45:41 PM	Tube furnace set to 0
11/14/2012	2:45:42 PM	Run finished at 2:45 PM
11/14/2012	2:52:08 PM	Main Vac valve closed
11/14/2012	2:52:21 PM	Main Vac valve opened
11/14/2012	2:53:33 PM	Recipe started at 2:53 PM
11/14/2012	2:53:33 PM	Helium valve closed
11/14/2012	2:53:33 PM	H2 valve closed
11/14/2012	2:53:33 PM	BCl3 valve closed
11/14/2012	2:53:33 PM	PH3 valve closed
11/14/2012	2:53:33 PM	SiCl4 pre valve closed
11/14/2012	2:53:33 PM	SiCl4 post valve closed
11/14/2012	2:53:33 PM	Main Vac valve closed
11/14/2012	2:53:33 PM	Bypass valve closed
11/14/2012	2:53:33 PM	Bubbler valve closed
11/14/2012	2:53:33 PM	Helium MFC set to  0.000000
11/14/2012	2:53:33 PM	H2 MFC set to  0.000000
11/14/2012	2:53:33 PM	BCl3 MFC set to  0.000000
11/14/2012	2:53:33 PM	PH3 MFC set to  0.000000
11/14/2012	2:53:33 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:53:33 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:53:33 PM	Tube furnace set to 0
11/14/2012	2:53:36 PM	Helium valve closed
11/14/2012	2:53:36 PM	BCl3 valve closed
11/14/2012	2:53:36 PM	PH3 valve closed
11/14/2012	2:53:36 PM	SiCl4 pre valve closed
11/14/2012	2:53:36 PM	SiCl4 post valve closed
11/14/2012	2:53:36 PM	Main Vac valve closed
11/14/2012	2:53:36 PM	Bypass valve closed
11/14/2012	2:53:36 PM	Bubbler valve closed
11/14/2012	2:53:36 PM	H2 valve opened
11/14/2012	2:53:36 PM	Helium MFC set to  0.000000
11/14/2012	2:53:36 PM	H2 MFC set to  500.000000
11/14/2012	2:53:36 PM	BCl3 MFC set to  0.000000
11/14/2012	2:53:36 PM	PH3 MFC set to  0.000000
11/14/2012	2:53:36 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:53:36 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:53:36 PM	Tube furnace set to 0
11/14/2012	2:54:48 PM	Helium valve closed
11/14/2012	2:54:48 PM	BCl3 valve closed
11/14/2012	2:54:48 PM	PH3 valve closed
11/14/2012	2:54:48 PM	SiCl4 pre valve closed
11/14/2012	2:54:48 PM	SiCl4 post valve closed
11/14/2012	2:54:48 PM	Main Vac valve closed
11/14/2012	2:54:48 PM	Bypass valve closed
11/14/2012	2:54:48 PM	H2 valve opened
11/14/2012	2:54:48 PM	Bubbler valve opened
11/14/2012	2:54:48 PM	Helium MFC set to  0.000000
11/14/2012	2:54:48 PM	H2 MFC set to  500.000000
11/14/2012	2:54:48 PM	BCl3 MFC set to  0.000000
11/14/2012	2:54:48 PM	PH3 MFC set to  0.000000
11/14/2012	2:54:48 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:54:48 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:54:49 PM	Tube furnace set to 0
11/14/2012	2:54:50 PM	Helium valve closed
11/14/2012	2:54:50 PM	BCl3 valve closed
11/14/2012	2:54:50 PM	PH3 valve closed
11/14/2012	2:54:50 PM	SiCl4 pre valve closed
11/14/2012	2:54:50 PM	SiCl4 post valve closed
11/14/2012	2:54:50 PM	Main Vac valve closed
11/14/2012	2:54:50 PM	Bypass valve closed
11/14/2012	2:54:50 PM	H2 valve opened
11/14/2012	2:54:50 PM	Bubbler valve opened
11/14/2012	2:54:50 PM	Helium MFC set to  0.000000
11/14/2012	2:54:50 PM	H2 MFC set to  500.000000
11/14/2012	2:54:50 PM	BCl3 MFC set to  0.000000
11/14/2012	2:54:50 PM	PH3 MFC set to  0.000000
11/14/2012	2:54:50 PM	SiCl4 MFC set to  0.000000
11/14/2012	2:54:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	2:54:50 PM	Tube furnace set to 1000
11/14/2012	3:14:50 PM	Helium valve closed
11/14/2012	3:14:50 PM	PH3 valve closed
11/14/2012	3:14:50 PM	Main Vac valve closed
11/14/2012	3:14:50 PM	Bypass valve closed
11/14/2012	3:14:50 PM	H2 valve opened
11/14/2012	3:14:50 PM	BCl3 valve opened
11/14/2012	3:14:50 PM	SiCl4 pre valve opened
11/14/2012	3:14:50 PM	SiCl4 post valve opened
11/14/2012	3:14:50 PM	Bubbler valve opened
11/14/2012	3:14:50 PM	Helium MFC set to  0.000000
11/14/2012	3:14:50 PM	H2 MFC set to  450.000000
11/14/2012	3:14:50 PM	BCl3 MFC set to  1.300000
11/14/2012	3:14:50 PM	PH3 MFC set to  0.000000
11/14/2012	3:14:50 PM	SiCl4 MFC set to  50.000000
11/14/2012	3:14:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:14:50 PM	Tube furnace set to 1000
11/14/2012	3:24:50 PM	Helium valve closed
11/14/2012	3:24:50 PM	BCl3 valve closed
11/14/2012	3:24:50 PM	PH3 valve closed
11/14/2012	3:24:50 PM	SiCl4 pre valve closed
11/14/2012	3:24:50 PM	SiCl4 post valve closed
11/14/2012	3:24:50 PM	Main Vac valve closed
11/14/2012	3:24:50 PM	Bypass valve closed
11/14/2012	3:24:50 PM	H2 valve opened
11/14/2012	3:24:50 PM	Bubbler valve opened
11/14/2012	3:24:50 PM	Helium MFC set to  0.000000
11/14/2012	3:24:50 PM	H2 MFC set to  500.000000
11/14/2012	3:24:50 PM	BCl3 MFC set to  0.000000
11/14/2012	3:24:50 PM	PH3 MFC set to  0.000000
11/14/2012	3:24:50 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:24:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:24:50 PM	Tube furnace set to 950
11/14/2012	3:26:50 PM	Helium valve closed
11/14/2012	3:26:50 PM	BCl3 valve closed
11/14/2012	3:26:50 PM	PH3 valve closed
11/14/2012	3:26:50 PM	SiCl4 pre valve closed
11/14/2012	3:26:50 PM	SiCl4 post valve closed
11/14/2012	3:26:50 PM	Main Vac valve closed
11/14/2012	3:26:50 PM	Bypass valve closed
11/14/2012	3:26:50 PM	H2 valve opened
11/14/2012	3:26:50 PM	Bubbler valve opened
11/14/2012	3:26:50 PM	Helium MFC set to  0.000000
11/14/2012	3:26:50 PM	H2 MFC set to  500.000000
11/14/2012	3:26:50 PM	BCl3 MFC set to  0.000000
11/14/2012	3:26:50 PM	PH3 MFC set to  0.000000
11/14/2012	3:26:50 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:26:50 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:26:51 PM	Tube furnace set to 900
11/14/2012	3:28:51 PM	Helium valve closed
11/14/2012	3:28:51 PM	BCl3 valve closed
11/14/2012	3:28:51 PM	PH3 valve closed
11/14/2012	3:28:51 PM	SiCl4 pre valve closed
11/14/2012	3:28:51 PM	SiCl4 post valve closed
11/14/2012	3:28:51 PM	Main Vac valve closed
11/14/2012	3:28:51 PM	Bypass valve closed
11/14/2012	3:28:51 PM	H2 valve opened
11/14/2012	3:28:51 PM	Bubbler valve opened
11/14/2012	3:28:51 PM	Helium MFC set to  0.000000
11/14/2012	3:28:51 PM	H2 MFC set to  500.000000
11/14/2012	3:28:51 PM	BCl3 MFC set to  0.000000
11/14/2012	3:28:51 PM	PH3 MFC set to  0.000000
11/14/2012	3:28:51 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:28:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:28:51 PM	Tube furnace set to 850
11/14/2012	3:30:51 PM	H2 valve closed
11/14/2012	3:30:51 PM	BCl3 valve closed
11/14/2012	3:30:51 PM	PH3 valve closed
11/14/2012	3:30:51 PM	SiCl4 pre valve closed
11/14/2012	3:30:51 PM	SiCl4 post valve closed
11/14/2012	3:30:51 PM	Main Vac valve closed
11/14/2012	3:30:51 PM	Bypass valve closed
11/14/2012	3:30:51 PM	Helium valve opened
11/14/2012	3:30:51 PM	Bubbler valve opened
11/14/2012	3:30:51 PM	Helium MFC set to  500.000000
11/14/2012	3:30:51 PM	H2 MFC set to  0.000000
11/14/2012	3:30:51 PM	BCl3 MFC set to  0.000000
11/14/2012	3:30:51 PM	PH3 MFC set to  0.000000
11/14/2012	3:30:51 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:30:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:30:51 PM	Tube furnace set to 800
11/14/2012	3:32:51 PM	H2 valve closed
11/14/2012	3:32:51 PM	BCl3 valve closed
11/14/2012	3:32:51 PM	PH3 valve closed
11/14/2012	3:32:51 PM	SiCl4 pre valve closed
11/14/2012	3:32:51 PM	SiCl4 post valve closed
11/14/2012	3:32:51 PM	Main Vac valve closed
11/14/2012	3:32:51 PM	Bypass valve closed
11/14/2012	3:32:51 PM	Helium valve opened
11/14/2012	3:32:51 PM	Bubbler valve opened
11/14/2012	3:32:51 PM	Helium MFC set to  500.000000
11/14/2012	3:32:51 PM	H2 MFC set to  0.000000
11/14/2012	3:32:51 PM	BCl3 MFC set to  0.000000
11/14/2012	3:32:51 PM	PH3 MFC set to  0.000000
11/14/2012	3:32:51 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:32:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:32:51 PM	Tube furnace set to 750
11/14/2012	3:34:51 PM	H2 valve closed
11/14/2012	3:34:51 PM	BCl3 valve closed
11/14/2012	3:34:51 PM	PH3 valve closed
11/14/2012	3:34:51 PM	SiCl4 pre valve closed
11/14/2012	3:34:51 PM	SiCl4 post valve closed
11/14/2012	3:34:51 PM	Main Vac valve closed
11/14/2012	3:34:51 PM	Bypass valve closed
11/14/2012	3:34:51 PM	Helium valve opened
11/14/2012	3:34:51 PM	Bubbler valve opened
11/14/2012	3:34:51 PM	Helium MFC set to  500.000000
11/14/2012	3:34:51 PM	H2 MFC set to  0.000000
11/14/2012	3:34:51 PM	BCl3 MFC set to  0.000000
11/14/2012	3:34:51 PM	PH3 MFC set to  0.000000
11/14/2012	3:34:51 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:34:51 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:34:51 PM	Tube furnace set to 0
11/14/2012	3:54:51 PM	Helium valve closed
11/14/2012	3:54:51 PM	H2 valve closed
11/14/2012	3:54:51 PM	BCl3 valve closed
11/14/2012	3:54:51 PM	PH3 valve closed
11/14/2012	3:54:51 PM	SiCl4 pre valve closed
11/14/2012	3:54:51 PM	SiCl4 post valve closed
11/14/2012	3:54:51 PM	Main Vac valve closed
11/14/2012	3:54:51 PM	Bypass valve closed
11/14/2012	3:54:51 PM	Bubbler valve closed
11/14/2012	3:54:51 PM	Helium MFC set to  0.000000
11/14/2012	3:54:51 PM	H2 MFC set to  0.000000
11/14/2012	3:54:52 PM	BCl3 MFC set to  0.000000
11/14/2012	3:54:52 PM	PH3 MFC set to  0.000000
11/14/2012	3:54:52 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:54:52 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:54:52 PM	Tube furnace set to 0
11/14/2012	3:54:53 PM	Helium valve closed
11/14/2012	3:54:53 PM	H2 valve closed
11/14/2012	3:54:53 PM	BCl3 valve closed
11/14/2012	3:54:53 PM	PH3 valve closed
11/14/2012	3:54:53 PM	SiCl4 pre valve closed
11/14/2012	3:54:53 PM	SiCl4 post valve closed
11/14/2012	3:54:53 PM	Main Vac valve closed
11/14/2012	3:54:53 PM	Bubbler valve closed
11/14/2012	3:54:53 PM	Bypass valve opened
11/14/2012	3:54:53 PM	Helium MFC set to  0.000000
11/14/2012	3:54:53 PM	H2 MFC set to  0.000000
11/14/2012	3:54:53 PM	BCl3 MFC set to  0.000000
11/14/2012	3:54:53 PM	PH3 MFC set to  0.000000
11/14/2012	3:54:53 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:54:53 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:54:53 PM	Tube furnace set to 0
11/14/2012	3:55:47 PM	Helium valve closed
11/14/2012	3:55:47 PM	H2 valve closed
11/14/2012	3:55:47 PM	BCl3 valve closed
11/14/2012	3:55:47 PM	PH3 valve closed
11/14/2012	3:55:47 PM	SiCl4 pre valve closed
11/14/2012	3:55:47 PM	SiCl4 post valve closed
11/14/2012	3:55:47 PM	Main Vac valve closed
11/14/2012	3:55:47 PM	Bubbler valve closed
11/14/2012	3:55:47 PM	Bypass valve opened
11/14/2012	3:55:47 PM	Helium MFC set to  0.000000
11/14/2012	3:55:47 PM	H2 MFC set to  0.000000
11/14/2012	3:55:47 PM	BCl3 MFC set to  0.000000
11/14/2012	3:55:47 PM	PH3 MFC set to  0.000000
11/14/2012	3:55:47 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:55:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:55:47 PM	Tube furnace set to 0
11/14/2012	3:56:47 PM	Helium valve closed
11/14/2012	3:56:47 PM	H2 valve closed
11/14/2012	3:56:47 PM	BCl3 valve closed
11/14/2012	3:56:47 PM	PH3 valve closed
11/14/2012	3:56:47 PM	SiCl4 pre valve closed
11/14/2012	3:56:47 PM	SiCl4 post valve closed
11/14/2012	3:56:47 PM	Bypass valve closed
11/14/2012	3:56:47 PM	Bubbler valve closed
11/14/2012	3:56:47 PM	Main Vac valve opened
11/14/2012	3:56:47 PM	Helium MFC set to  0.000000
11/14/2012	3:56:47 PM	H2 MFC set to  0.000000
11/14/2012	3:56:47 PM	BCl3 MFC set to  0.000000
11/14/2012	3:56:47 PM	PH3 MFC set to  0.000000
11/14/2012	3:56:47 PM	SiCl4 MFC set to  0.000000
11/14/2012	3:56:47 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	3:56:47 PM	Tube furnace set to 0
11/14/2012	3:56:48 PM	Run finished at 3:56 PM
11/14/2012	5:28:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	5:28:56 PM	Recipe started at 5:28 PM
11/14/2012	5:28:56 PM	Helium valve closed
11/14/2012	5:28:56 PM	H2 valve closed
11/14/2012	5:28:56 PM	BCl3 valve closed
11/14/2012	5:28:56 PM	PH3 valve closed
11/14/2012	5:28:56 PM	SiCl4 pre valve closed
11/14/2012	5:28:56 PM	SiCl4 post valve closed
11/14/2012	5:28:56 PM	Main Vac valve closed
11/14/2012	5:28:56 PM	Bypass valve closed
11/14/2012	5:28:56 PM	Bubbler valve closed
11/14/2012	5:28:56 PM	Helium MFC set to  0.000000
11/14/2012	5:28:56 PM	H2 MFC set to  0.000000
11/14/2012	5:28:56 PM	BCl3 MFC set to  0.000000
11/14/2012	5:28:56 PM	PH3 MFC set to  0.000000
11/14/2012	5:28:56 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:28:56 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:28:57 PM	Tube furnace set to 0
11/14/2012	5:29:00 PM	H2 valve closed
11/14/2012	5:29:00 PM	BCl3 valve closed
11/14/2012	5:29:00 PM	PH3 valve closed
11/14/2012	5:29:00 PM	SiCl4 pre valve closed
11/14/2012	5:29:00 PM	SiCl4 post valve closed
11/14/2012	5:29:00 PM	Main Vac valve closed
11/14/2012	5:29:00 PM	Bypass valve closed
11/14/2012	5:29:00 PM	Bubbler valve closed
11/14/2012	5:29:00 PM	Helium valve opened
11/14/2012	5:29:00 PM	Helium MFC set to  500.000000
11/14/2012	5:29:00 PM	H2 MFC set to  0.000000
11/14/2012	5:29:00 PM	BCl3 MFC set to  0.000000
11/14/2012	5:29:00 PM	PH3 MFC set to  0.000000
11/14/2012	5:29:00 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:29:00 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:29:00 PM	Tube furnace set to 0
11/14/2012	5:30:13 PM	Helium valve closed
11/14/2012	5:30:13 PM	H2 valve closed
11/14/2012	5:30:13 PM	BCl3 valve closed
11/14/2012	5:30:13 PM	PH3 valve closed
11/14/2012	5:30:13 PM	SiCl4 pre valve closed
11/14/2012	5:30:13 PM	SiCl4 post valve closed
11/14/2012	5:30:13 PM	Main Vac valve closed
11/14/2012	5:30:13 PM	Bypass valve closed
11/14/2012	5:30:13 PM	Bubbler valve closed
11/14/2012	5:30:13 PM	Helium MFC set to  0.000000
11/14/2012	5:30:13 PM	H2 MFC set to  0.000000
11/14/2012	5:30:13 PM	BCl3 MFC set to  0.000000
11/14/2012	5:30:13 PM	PH3 MFC set to  0.000000
11/14/2012	5:30:13 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:30:13 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:30:13 PM	Tube furnace set to 0
11/14/2012	5:30:14 PM	Run finished at 5:30 PM
11/14/2012	5:30:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/14/2012	5:32:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/14/2012	5:32:13 PM	Recipe started at 5:32 PM
11/14/2012	5:32:13 PM	Helium valve closed
11/14/2012	5:32:13 PM	H2 valve closed
11/14/2012	5:32:13 PM	BCl3 valve closed
11/14/2012	5:32:13 PM	PH3 valve closed
11/14/2012	5:32:13 PM	SiCl4 pre valve closed
11/14/2012	5:32:13 PM	SiCl4 post valve closed
11/14/2012	5:32:13 PM	Main Vac valve closed
11/14/2012	5:32:13 PM	Bubbler valve closed
11/14/2012	5:32:13 PM	Bypass valve opened
11/14/2012	5:32:13 PM	Helium MFC set to  0.000000
11/14/2012	5:32:13 PM	H2 MFC set to  0.000000
11/14/2012	5:32:13 PM	BCl3 MFC set to  0.000000
11/14/2012	5:32:13 PM	PH3 MFC set to  0.000000
11/14/2012	5:32:13 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:32:13 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:32:14 PM	Tube furnace set to 0
11/14/2012	5:33:22 PM	Helium valve closed
11/14/2012	5:33:22 PM	H2 valve closed
11/14/2012	5:33:22 PM	BCl3 valve closed
11/14/2012	5:33:22 PM	PH3 valve closed
11/14/2012	5:33:22 PM	SiCl4 pre valve closed
11/14/2012	5:33:22 PM	SiCl4 post valve closed
11/14/2012	5:33:22 PM	Main Vac valve closed
11/14/2012	5:33:22 PM	Bubbler valve closed
11/14/2012	5:33:22 PM	Bypass valve opened
11/14/2012	5:33:22 PM	Helium MFC set to  0.000000
11/14/2012	5:33:22 PM	H2 MFC set to  0.000000
11/14/2012	5:33:22 PM	BCl3 MFC set to  0.000000
11/14/2012	5:33:22 PM	PH3 MFC set to  0.000000
11/14/2012	5:33:22 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:33:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:33:22 PM	Tube furnace set to 0
11/14/2012	5:34:22 PM	Helium valve closed
11/14/2012	5:34:22 PM	H2 valve closed
11/14/2012	5:34:22 PM	BCl3 valve closed
11/14/2012	5:34:22 PM	PH3 valve closed
11/14/2012	5:34:22 PM	SiCl4 pre valve closed
11/14/2012	5:34:22 PM	SiCl4 post valve closed
11/14/2012	5:34:22 PM	Bypass valve closed
11/14/2012	5:34:22 PM	Bubbler valve closed
11/14/2012	5:34:22 PM	Main Vac valve opened
11/14/2012	5:34:22 PM	Helium MFC set to  0.000000
11/14/2012	5:34:22 PM	H2 MFC set to  0.000000
11/14/2012	5:34:22 PM	BCl3 MFC set to  0.000000
11/14/2012	5:34:22 PM	PH3 MFC set to  0.000000
11/14/2012	5:34:22 PM	SiCl4 MFC set to  0.000000
11/14/2012	5:34:22 PM	Bypass solenoid MFC set to  0.000000
11/14/2012	5:34:23 PM	Tube furnace set to 0
11/14/2012	5:34:24 PM	Run finished at 5:34 PM
11/14/2012	5:34:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
